&lt;title&gt;High-precision interferometric shape measurement of objects with areas of different reflectance&lt;/title&gt;

Schmit, Joanna; Harasaki, Akiko

doi:10.1117/12.429351

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High Dynamic Range (Hdr)1

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2014

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“…This doubly penalizes low-reflectance regions, already more prone to data drop-out due to their lowcontrast interferometric signal, by additionally light-starving them. Schmit et al propose two approaches [4]. The first is restricted to parts comprising known disparate reflectances at known well-separated scan locations: light level is changed between optimized values midway between the reflectance populations.…”

Section: High Dynamic Range (Hdr)mentioning

confidence: 99%

Measuring High-Slope and Super-Smooth Optics with High-Dynamic-Range Coherence Scanning Interferometry

Fay

Lega

Groot

2014

Classical Optics 2014

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Advances in the implementation of coherence scanning interferometry have dramatically extended the range of application for this well-known technique. New data acquisition and data processing methods significantly improve dynamic range, enabling measurements of steeply-sloped surfaces usually considered beyond the reach of high-NA objectives. Hybrid data acquisition incorporating sinusoidally-modulated phase shifting reduces signal-to-noise to the 0.1 nm/√Hz level, extending the technique to super-polished surfaces.

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Section: High Dynamic Range (Hdr)mentioning

confidence: 99%