<title>High-power narrow-band tunable injection-locked KrF laser system</title>

Abstract

A high-power KrP laser system based on a wide-aperture electron-beam pumped excimer laser "GARPUN" with injection-locking from a discharge pumped narrow-band oscillator haseen eveloped.The laser radiation spectral brightness of " 5 x 10 W/cm srad cm with narrow linewidth , 0. 1 cm tunable near = 248 nm, and the output peak power of ' I GW have been obtained.