1999
DOI: 10.1117/12.349672
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<title>High-field electrostriction of elastomeric polymer dielectrics for actuation</title>

Abstract: This paper investigates the use of elastomeric dielectric materials with compliant electrodes as a means of actuation. When a voltage is applied to the electrodes, the elastomeric films expand in area and compress in thickness. The strain response to applied electric fields was measured for a variety of elastomers. A nonlinear high-strain Mooney-Rivlin model was used to determine the expected strain response for a given applied field pressure. Using this model, we determined that the electrostatic forces betwe… Show more

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Cited by 102 publications
(64 citation statements)
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“…This step is followed by the etching of the exposed metal (c), and finally the photoresist is stripped from the metal (d). This process, which is the standard patterning method used in the integrated-circuit (IC) industry, has been successfully demonstrated to pattern metallic electrodes on elastomeric membranes for DEA applications by several authors [9,27,50,53,64]. Compared to the shadow mask process, any shape can be realized with photolithography, and features with size down to 5 µm have been demonstrated on soft polymers [9].…”
Section: Metal Etchingmentioning
confidence: 99%
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“…This step is followed by the etching of the exposed metal (c), and finally the photoresist is stripped from the metal (d). This process, which is the standard patterning method used in the integrated-circuit (IC) industry, has been successfully demonstrated to pattern metallic electrodes on elastomeric membranes for DEA applications by several authors [9,27,50,53,64]. Compared to the shadow mask process, any shape can be realized with photolithography, and features with size down to 5 µm have been demonstrated on soft polymers [9].…”
Section: Metal Etchingmentioning
confidence: 99%
“…In addition to being quite difficult to handle due to their high sensitivity to static charges, loose powders present several disadvantages: maintaining full coverage at large strains is difficult, [9,27] and the lifetime of the electrode is limited due to the possibility of the conductive particles to detach from the electrode. Consequently, electrodes with loose powders are mainly found in combination with adhesive acrylic elastomers (such as VHB from 3M) as dielectric layer: because this material is intrinsically sticky, the conductive particles become bound to its surface.…”
Section: Carbon Powdermentioning
confidence: 99%
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“…This attraction leads to a thickness-wise contraction and planar expansion of the elastomer. DE film can be made using several well-known techniques, including spin coating, dip coating and casting [14].…”
Section: Background On De Artificial Musclementioning
confidence: 99%
“…DE is a new transducer technology which uses rubber-like polymers called elastomers as actuator materials [13][14][15]. The core element of DE is a simple structure comprised of a thin elastomer sandwiched between flexible electrodes.…”
Section: Background On De Artificial Musclementioning
confidence: 99%