&lt;title&gt;Fringe-image processing gauge block comparator of high precision&lt;/title&gt;

Malinovsky, Igor; Титов, А. Н.; Massone, C. A.

doi:10.1117/12.323096

Cited by 12 publications

(27 citation statements)

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“…In [2] we report a method that permits to decrease the inclination error and to measure the corresponding correction with sub-nm uncertainty. In these experiments, the laser focus spot inside the input diaphragm of the comparator was formed to be small, and then it was moved inside the diaphragm along its axis's.…”

Section: Inierferometer and Measurement Methodsmentioning

confidence: 99%

“…Deformations, which accompany the process of wringing, have been studied for gauge blocks and reference plates in some detail in [2], including the effects of block dimensions and the type of material used for reference plates. It follows from the results of the measurements that for the blocks with nominal lengths below 7mm and wrung to a steel plate, the deformations of the plate are much smaller than the deformations of the block.…”

Section: Inierferometer and Measurement Methodsmentioning

confidence: 99%

“…Here, we report some studies to realize sub-nm accuracy in gauge block measurements, that were performed with a newly developed primary level comparator [1,2]. The instrument is intended for realization of the SI length unit in the range of 0-100 mm.…”

Section: Inierferometer and Measurement Methodsmentioning

confidence: 99%

“…In our method the deformations ofthe quartz plate, caused by block's wringing, are also taken into account. These deformations can be measured directly using the procedure described in detail in [2]. In these experiments variations in flatness of the quartz plate are recorded while reducing gradually the interaction between the block and the plate by the slowly penetrating oil.…”

Section: Si L0limentioning

confidence: 99%

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<title>Realizing subnanometer accuracy level in gauge block measurements</title>

1998

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A new fringe-pattern analyzing interferometer, featuring ultimate resolution of a few parts in iOu, stability of readings of about 0. 1 nm and non-excluded systematic uncertainties due to optic effects of less than 1 nm, has been used to study some systematic effects in gauge block length measurements. Measurements on steel and quartz plates are analyzed. Limitations of the present definition of the length of the block are outlined. Stability and reproducibility of the wringing procedure for steel and quartz plates are reported. A new double-ended method in length measurements of gauge blocks has been realized.It includes determination of the corrections for non-ideal optics of the interferometer, curvature of the plate and deformations of the quartz plate due to wringing of the block to its surface. The result of the length measurement is not affected, in the first approximation, by deformation ofthe plate and the quality of wringing.

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Section: Inierferometer and Measurement Methodsmentioning

confidence: 99%

Section: Inierferometer and Measurement Methodsmentioning

confidence: 99%

Section: Inierferometer and Measurement Methodsmentioning

confidence: 99%

Section: Si L0limentioning

confidence: 99%

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<title>Realizing subnanometer accuracy level in gauge block measurements</title>

1998

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“…The gauge block interferometer, used in almost all of these studies, is a fringe-pattern analyzing comparator [5,6], similar to the well-known NPL-TESA automatic interferometer. The general view of it is shown in Fig 1 . The interferometer is well thermally isolated, and installed on a massive granite slab.…”

Section: Optical Comparatormentioning

confidence: 99%

Scientific basis for traceable dimensional measurements in a nanometer range: methods and concepts

2001

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New parallax-free methods of interferometric length measurements, developed recently at INMETRO (Brazil), give the possibility to exclude, practically completely, the uncertainties related to the wringing procedure of a gauge block to a reference plate. It is shown experimentally that the uncertainty of the length measurement by optical interferometry can be reduced to the value of about 1 A. The temperature measurements of a material artefact are demonstrated with the uncertainty of less than 0. 1 milli-Kelvin. There are no basic restrictions for the improvement of the practical realization of the SI length unit, based on the measurements of material length standards by optical interferometry to the level of -o.oo1 ppm. Two new, independent length specifying parameter for a gauge block are introduced, i.e. the mechanical and optical lengths of a block, which correspond to the length measurements with the uncertainty level indicated above. Parallax-free measurements of the optical length of the block has been performed for a 'free" block in unperturbed state. Basically new concept for length metrology, i.e. the concept of a free, unperturbed artefact, has been introduced into the length measurements.

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Gauge block measurements with nanometre uncertainty

2000

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A fringe-pattern analysing interferometer with a resolution of 1 10 -9 , stability of readings of about 0.1 nm, and an uncertainty owing to optical effects of less than 1 nm, has been used to study some systematic effects in gauge block length measurements. Measurements on steel and quartz plates with sub-nanometre reproducibility are reported. An accuracy of about 1 nm is demonstrated for a combination of reproducible wringing and slave-block techniques. The limitations of the present definition of the length of a gauge block are highlighted. A double-sided method for length measurement of gauge blocks has been realized, the results of which are not affected by excessive thickness of the wringing film and which incorporate a correction on the interferometer optics.

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<title>Fringe-image processing gauge block comparator of high precision</title>

Cited by 12 publications

References 0 publications

<title>Realizing subnanometer accuracy level in gauge block measurements</title>

<title>Realizing subnanometer accuracy level in gauge block measurements</title>

Scientific basis for traceable dimensional measurements in a nanometer range: methods and concepts

Gauge block measurements with nanometre uncertainty

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