&lt;title&gt;Fabrication and properties of refractive micro-optical beam-shaping elements&lt;/title&gt;

Kley, Ernst‐Bernhard; Wittig, Lars-Christian; Cumme, Matthias; Zeitner, Uwe D.; Dannberg, Peter

doi:10.1117/12.360513

Cited by 12 publications

(2 citation statements)

References 4 publications

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“…Gray-scale lithography has been proven to be a suitable technology for the fabrication of arbitrary three-dimensional surface profiles [10]- [12]. This technology uses the high energy beam sensitive (HEBS) (Canyon Materials, Inc.) as a real grayscale mask in conventional photolithographic contact printing.…”

Section: A Gray-scale Lithographymentioning

confidence: 99%

Efficient Planar-Integrated Free-Space Optical Interconnects Fabricated by a Combination of Binary and Analog Lithography

Heming

Wittig

Dannberg

et al. 2008

J. Lightwave Technol.

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Abstract-Design, fabrication, and experimental testing of an integrated microoptical module for interconnection are reported. The systems integration is based on the concept of planar-integrated free-space optics. The module combines diffractive-reflective and refractive microoptics. The diffractive elements were fabricated by binary lithography and reactive ion etching. The refractive elements were made by analog lithography using a high-energy beam sensitive mask and replication in Ormocer. The fabricated module implemented a simple one-dimensional optical interconnect. Two versions were implemented for which insertion losses of approximately 8 and 4.5 dB were measured, respectively.

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Section: A Gray-scale Lithographymentioning

confidence: 99%

Efficient Planar-Integrated Free-Space Optical Interconnects Fabricated by a Combination of Binary and Analog Lithography

Heming

Wittig

Dannberg

et al. 2008

J. Lightwave Technol.

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show abstract

“…This technology is well adapted for the fabrication ofdeep micro-optical elements. [8,9] The element A is symmetric with respect to the center and divided into three parts. The left and right part of the element deflect the light horizontally and vertically while focusing at the same time.…”

Section: Photolithographic Stepmentioning

confidence: 99%

<title>Fabrication technologies for micro-optical elements with arbitrary surfaces</title>

et al. 2000

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Image communication scheme based on dynamic visual cryptography and computer generated holography

Palevicius

Ragulskis

2015

Optics Communications

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<title>Fabrication and properties of refractive micro-optical beam-shaping elements</title>

Cited by 12 publications

References 4 publications

Efficient Planar-Integrated Free-Space Optical Interconnects Fabricated by a Combination of Binary and Analog Lithography

Efficient Planar-Integrated Free-Space Optical Interconnects Fabricated by a Combination of Binary and Analog Lithography

<title>Fabrication technologies for micro-optical elements with arbitrary surfaces</title>

Image communication scheme based on dynamic visual cryptography and computer generated holography

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