&lt;title&gt;Fabrication and characterization of a micromachined deformable mirror for adaptive optics applications&lt;/title&gt;

Miller, L. M.; Agronin, Michael L.; Bartman, Randall K.; Kaiser, William J.; Kenny, Thomas W.; Norton, Robert L.; Vote, E. C.

doi:10.1117/12.158786

Cited by 32 publications

(14 citation statements)

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“…A variety of MEMS-based deformable mirrors have been investigated by other research groups [1][2][3][4][5] . Fig.…”

Section: Mems Deformable Mirrorsmentioning

confidence: 99%

Real-time phase correction of optical images using adaptive optics system based on MEMS technology

Chen

et al. 2007

SPIE Proceedings

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The possibility of compensating the wave-front distortion of an optical imaging system in real time has been a subject of considerable interest. To compensate the wave-front aberration resulted by atmospheric turbulence, random gravity, heat and component surface error during manufacturing, adaptive optics is an effective way. But conventional adaptive optics has not found widespread acceptance outside the high-end astronomy community due to the cost and complexity. With the development of micro-electro-mechanical systems (MEMS) based on silicon micromaching technology, it is possible to develop a low-cost adaptive optics system. In this paper we will describe a micro-adaptive imaging system that has proved the practical feasibility of real time optical phase correction. As a key component in our adaptive optics system, a novel silicon bulk micromaching deformable mirror was used to compensate the wave-front aberration of optical image . The laboratory experiments are also presented to reveal the benefit that such system can provide. Future possible improvements are addressed as well.

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“…A variety of MEMS-based deformable mirrors have been investigated by other research groups [1][2][3][4][5] . Fig.…”

Section: Mems Deformable Mirrorsmentioning

confidence: 99%

Real-time phase correction of optical images using adaptive optics system based on MEMS technology

Chen

et al. 2007

SPIE Proceedings

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“…Silicon micromachining and hybrid technology have been recently applied to the fabrication of adaptive optical components [4,5].…”

Section: Introductionmentioning

confidence: 99%

<title>Technology, characterization, and applications of adaptive mirrors fabricated with IC-compatible micromachining</title>

et al. 1995

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Fabrication of electrostatically controlled membrane adaptive mirrors produced with IC-compatible micromachining is reported. Mirrors have rectangular reflective apertures with sizes varied from lxlmm up to llxllmm. The surface of the flexible mirror is formed by a free-suspended 0.5um -thick silicon nitride film coated with a thin reflective layer of aluminum. The RMS deviation from plane for a mirror having one square centimeter aperture is 0.2urn, mirrors with optical quality up to A/20 may be selected from batch. Up to sixteen mirrors can be fabricated on one four-inch silicon wafer. Optical figure of the reflective membrane is controlled by an array of 1.. . 100 electrostatic actuators of arbitrary shape placed 20. . . 100jm beneath the reflecting membrane. Technology of fabrication is flexible enough to allow for fabrication of varifocal mirrors, multichannel adaptive mirrors and spatial light modulators. These and some other applications are discussed in the report.

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“…[12][13][14][15][16][17][18][19] The MEM-DMs studied here are segmented, piston-only deformable mirrors, fabricated in dense arrays. Individual mirror segments in these MEM-DMs are typically on the order of a few to several tens of microns in their largest dimension.…”

Section: Introductionmentioning

confidence: 99%

Use of micro-electro-mechanical deformable mirrors to control aberrations in optical systems: theoretical and experimental results

Roggeman

Bright²,

Welsh

et al. 1997

Opt. Eng

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Micro-electro-mechanical deformable mirrors (MEM-DMs) are solid-state electronic devices with small, movable reflective surface elements that can be used to manipulate the phase of optical wavefronts. MEM-DMs differ from more conventional continuous-facesheet deformable mirrors in that the movable surface of a MEM-DM consists of a set of segmented moving surfaces. The segmented, reflective surfaces of a MEM-DM give rise to larger diffraction effects than those provided by continuous-facesheet deformable mirrors. However, MEM-DMs are still attractive due to their low cost and the low drive voltages. We explore the theoretical limits of performance of MEM-DMs for controlling fixed aberrations in optical systems, and we present laboratory results demonstrating reduction of a fixed aberration using a MEM-DM device. Results presented here show that while a MEM-DM does provide some degree of aberration control, diffraction effects arising from the static support structures of the MEM-DM surface are significant. An alternative design that uses a lenslet array in conjunction with the MEM-DM is shown through theoretical studies to provide superior aberration correction with lower residual effects due to diffraction. © 1997 Society of Photo-Optical Instrumentation Engineers. [S0091-3286(97)

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<title>Fabrication and characterization of a micromachined deformable mirror for adaptive optics applications</title>

Cited by 32 publications

References 0 publications

Real-time phase correction of optical images using adaptive optics system based on MEMS technology

Real-time phase correction of optical images using adaptive optics system based on MEMS technology

<title>Technology, characterization, and applications of adaptive mirrors fabricated with IC-compatible micromachining</title>

Use of micro-electro-mechanical deformable mirrors to control aberrations in optical systems: theoretical and experimental results

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