HfO 2 single layers and HfO 2 /SiO 2 high reflectors with standard 1/4 wavelength design were prepared by ion assisted deposition (IAD) with APS ion source and ion beam sputtering (IBS). Characterization of HfO 2 single layers such as structural and optical properties, surface topography and absorption have been studied. The laser-induced damage thresholds (LIDTs) of the high reflectors with different multilayer stacks at 1064nm were tested with S-on-1 testing mode according to ISO-11254. In addition, optical properties, surface topography and absorption of these testing high reflectors have also been investigated in our experiments. All the results used to analyze the LIDTs of high reflectors have been discussed and interpreted in literature.