2008
DOI: 10.1117/12.802270
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<title>Digital transformations of the phase measurement information in the high resolution heterodyne laser interferometry</title>

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Cited by 7 publications
(11 citation statements)
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“…Until relatively recently, 10-30 years ago, the noise of the photodetector was the most important limitation determining the resolution of AO LDI [15,16]. Progress in the construction of the schemes of AO LDI led to the understanding that the reduction of the influence of these noises can be implemented in two ways: 1) selection of photodetectors with an optimal ratio between the frequency of AO modulation f aom and the level of the photodetector's own noise, taking into account their significantly nonlinear increase the noise from frequency;…”
Section: Phase Error Due To Photodetector Noisementioning
confidence: 99%
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“…Until relatively recently, 10-30 years ago, the noise of the photodetector was the most important limitation determining the resolution of AO LDI [15,16]. Progress in the construction of the schemes of AO LDI led to the understanding that the reduction of the influence of these noises can be implemented in two ways: 1) selection of photodetectors with an optimal ratio between the frequency of AO modulation f aom and the level of the photodetector's own noise, taking into account their significantly nonlinear increase the noise from frequency;…”
Section: Phase Error Due To Photodetector Noisementioning
confidence: 99%
“…The current trend of their improvement is to increase the resolution to the level of subpicometric values, less than 1 ρm [7][8][9]. LDI with acousto-optic (AO) modulation of the optical flow can be considered one of the most promising [11][12][13][14][15][16][17][18][19][20]. To increase the resolution of AO LDI, it was proposed to use two measuring channels (in future -channel) with the same stages for measuring cyclic start-stop movements: "fast inaccurate" and "slow accurate".…”
Section: Introductionmentioning
confidence: 99%
“…Heterodyne speckle pattern interferometry [1] is a relatively new speckle technique by combining electronic speckle pattern interferometry [2] and heterodyne interferometry [3][4][5] and which can provide full-field measurement of dynamic displacement down to submicron scale. However, most of the reported designs of heterodyne speckle pattern interferometer found in literature required complicated optics and control systems.…”
Section: Introductionmentioning
confidence: 99%
“…The calibration method has the following advantages: high rate of calibration procedure; lack of any need for the use of measurement markers of special form; and the fact that it is possible to use the method in mobile coordinatemeasuring systems. The principal drawback of the method lies in the complexity of the process of estimating the actual coordinates of the centers of the markers in a three-dimensional coordinate system in the course of calibration [9,10].…”
mentioning
confidence: 99%