<title>Development of a novel piezo-driven parallel-kinematics single crystal silicon micropositioning XY stage</title>

Abstract

We developed a novel piezo-driven parallel-kinematics single crystal silicon micropositioning XY stage. This monolithic design features parallelogram four-bar linkages, flexure hinges and piezoelectric stack actuators. The stage is made from single crystal silicon because it has excellent mechanical properties compared to metals, which result in high bandwidth, large work zone and compact size of the stage. Kinematics and dynamics analysis were performed for the design. We also developed microfabrication procedures to make the prototype of the stage. Experiment results show that the mechanical structure of the stage can deliver a 400µm by 400µm square work zone without failing any flexure hinges. With two piezoelectric stack actuators mounted, the stage is able to do open-loop contouring in a 32µm by 32µm work zone with 160V driving voltages applied. The resonation frequencies of the stage are between 1,300 and 1,400Hz.

Design, fabrication and testing of a silicon-on-insulator (SOI) MEMS parallel kinematicsXYstage

“…Different technologies have been used to provide actuation to silicon-based MEMS (micro-electro-mechanical systems) micro positioning systems, including piezoelectricactuators [13], shape memory alloy actuators [14], electromagnetic actuators [7], electro-thermal actuator [15] and electrostatic comb-drive actuators [1-6, 8-12, 16-20]. Among these actuation technologies, electrostatic comb-drive actuators are most commonly used because of their simplicity and the ease with which their fabrication is integrated with that of the rest of the structure.…”

“…Parallel kinematic mechanisms, which have been widely used for macro and meso scale positioning systems [13,[20][21][22], can be designed so as to be better suited for siliconbased micro positioners. A parallel kinematic mechanism (PKM) consists of a fixed base and movable end-effector connected in parallel by multiple independent kinematic chains.…”

Parallel-kinematics XYZ MEMS part 1: Kinematics and design for fabrication

“…Some of the important reasons why MEMS positioners play an important role in nanotechnology are: size, high dynamic range, high resolution of motion or force, and integrated fabrication with other elements of micro-systems. With the latter often being critical consideration in applications that embed MEMS-based nanopositioners, while piezoelectric actuators [11], shape memory alloy actuators [12], electromagnetic actuators, electrothermal actuators [13] have been suggested, electrostatic comb-drive actuators [1]- [10], [14], [15], [16], [17], [18] are most commonly used.…”

“…Parallel-kinematics mechanisms, that have been increasingly studied for use in macro and meso-scale positioning systems [11], [24], [26] can be designed so as to be better suited for silicon-based, MEMS-scale micro-and nanopositioners. A parallelkinematics mechanism (PKM) consists of a fixed base and movable end-effector connected in parallel by multiple independent kinematic chains.…”

A thermal-driven silicon microxy-stage integrated with piezoresistive sensors for nano-positioning

“…However, the electrostatic actuator requires several tens of volts for reliable operation. Other types of excitation micro-actuators are based on the piezoelectric effect [2], shape memory alloy [3], the electromagnetic method [4] and electro-thermal mechanisms [5,6]. The fabrication of a piezoelectric actuator requires ultrahigh precision manufacturing with correspondingly high costs [7][8][9][10].…”