&lt;title&gt;Contactless embossing of microlenses: a new technology for manufacturing refractive microlenses&lt;/title&gt;

Schulze, Jens; Ehrfeld, W.; Loewe, Holger; Michel, A.; Picard, Antoni

doi:10.1117/12.281212

Cited by 10 publications

(3 citation statements)

References 11 publications

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“…Auch masterlose Preßtech-niken in Kunststoff wurden erfolgreich angewendet [5]. Die Linsen können entweder diffraktiv oder refraktiv realisiert sein.…”

Section: Prinzip Und Technik Der Wellenfrontrekonstruktionunclassified

Optische Vermessung mit Wellenfrontsensoren

Faulstich¹

1998

tm - Technisches Messen

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Schlagwörter: Oberflächenanalyse, Wellenfrontrekonstruktion, Shack-Hartmann-Sensor, Aberration, Laserstrahl Die Vermessung von optischen Komponenten mittels Wellenfrontsensoren wird vorgestellt. Es werden Aufbau und Arbeitsweise eines Wellenfrontsensors nach dem Shack-Hartmann-Prinzip beschrieben und mechanische Einflüsse auf die Meßgenauigkeit diskutiert, ebenso Methoden zur Kalibrierung des Sensors. Entsprechende Meßaufbauten für die Oberflächenprüfung und die Vermessung von Optiken werden mit ihren Vorund Nachteilen angegeben. Schließlich wird die Vermessung von Laserstrahlen mit einem Shack-HartmannSensor skizziert. Optical testing using wave front sensorsTesting of optical components using wave front sensors is presented. Realisation and working principle of a Shack-Hartmann wave front sensor is described and mechanical influence on accuracy is discussed as well as methods for calibration. Possible arrangements for measurement of surface quality and imaging properties of optical devices is discussed. Finally, the characterisation of laser beams with a wave front sensor is presented.

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“…Auch masterlose Preßtech-niken in Kunststoff wurden erfolgreich angewendet [5]. Die Linsen können entweder diffraktiv oder refraktiv realisiert sein.…”

Section: Prinzip Und Technik Der Wellenfrontrekonstruktionunclassified

Optische Vermessung mit Wellenfrontsensoren

Faulstich¹

1998

tm - Technisches Messen

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“…Especially for polymers the so called contact-less hot embossing (CEM) process, which was developed at IMM is well suited for fabrication of conventional refractive micro-lenses, even as large arrays [2]. However, if prototyping of micro-lenses or micro-lenses on pre-defined substrates or Fresnel-lenses are desired, the CEM process cannot be applied easily.…”

Section: Introductionmentioning

confidence: 98%

Fabrication of micro-lenses using excimer laser ablation by means of laser-generated grey-tone-masks

Klotzbuecher

Dadic

2010

SPIE Proceedings

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Micro-lenses, including Fresnel-Lenses, were fabricated by excimer laser ablation of polymers by means of lasergenerated grey-tone-masks. The smallest reproducible holes that could be fabricated by excimer laser ablation (193 nm, 1 J/cm²) of chromium-on-quartz (thickness 50-100 nm) were around 3 µm, the pitch of which should be at least at the same value to ensure a reproducibility of hole-arrays. To achieve acceptable ablation times during the fabrication of the grey-tone-masks, on-the-fly ablation instead of step-and-repeat technique was used, operating the laser at a constant pulse repetition rate <30 Hz with a continuously moving quartz-substrate. In this way and using different encoding techniques it was possible to generate at least 11 different grey-tones. The available grey-tones were used to generate grey-tone-masks for ablation of Polymethylmethacrylate (PMMA) and Polycarbonate (PC). For that, fluences in the range of 0.07-0.14 J/cm² could be applied, corresponding to a value of 1.25 J/cm² on the workpiece without grey-tonemask and a value lying well below the damage threshold of the chromium mask. Refractive micro-lenses fabricated in this way did not show a good imaging quality, since 11 grey-tones is less than required to generate a continuous surface profile over the full diameter of the lens during ablation and the achievable aspect ratio is limited with the small fluences. However, flat diffractive micro-lenses of the Fresenel type with a quasi-continuously surface profile could be fabricated in a sufficient manner. This can be attributed to the fact that each segment of the Fresenel-lenses can be encoded by 11 grey-tones, leading to much smoother surface reliefs and to a sufficient imaging quality.

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“…For morphologic accuracy of mold fabrication, the mold with the micro-hole array is an effective tool to form the micro-lens array. Schulze et al [24,25] first proposed the contactless embossing technology to fabricate a micro-lens array (CEM). CEM is a potential method for the achievement of mass production.…”

Section: Introductionmentioning

confidence: 99%

Manufacturing of Micro-Lens Array Using Contactless Micro-Embossing with an EDM-Mold

Huang

et al. 2018

Applied Sciences

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Micro embossing is an effective way to fabricate a polymethyl methacrylate (PMMA) specimen into micro-scale array structures with low cost and large volume production. A new method was proposed to fabricate a micro-lens array using a micro-electrical discharge machining (micro-EDM) mold. The micro-lens array with different shapes was established by controlling the processing parameters, including embossing temperature, embossing force, and holding time. In order to obtain the friction coefficient between the PMMA and the mold, ring compression tests were conducted on the Shenzhen University’s precision glass molding machine (SZU’s PGMM30). It was found that the friction coefficient between the PMMA specimen and the mold had an interesting change process with increasing of temperature, which affected the final shape and stress distribution of the compressed PMMA parts. The results of micro-optical imaging of micro-lens array indicated that the radius of curvature and local length could be controlled by adjusting the processing parameters. This method provides a basis for the fabrication and application of micro-lens arrays with low-cost, high efficiency, and mass production.

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<title>Contactless embossing of microlenses: a new technology for manufacturing refractive microlenses</title>

Cited by 10 publications

References 11 publications

Optische Vermessung mit Wellenfrontsensoren

Optische Vermessung mit Wellenfrontsensoren

Fabrication of micro-lenses using excimer laser ablation by means of laser-generated grey-tone-masks

Manufacturing of Micro-Lens Array Using Contactless Micro-Embossing with an EDM-Mold

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