&lt;title&gt;Combined scanning optical and force microscope using interferometric detection&lt;/title&gt;

Wright, C. David; Clegg, W.W.; Cheng, Stone; Crozier, P. J.; Cunningham, Michael J.; Hill, E.W.; Hayashi, Kazuhiko; Birtwistle, John

doi:10.1117/12.172606

SPIE Proceedings

1994

DOI: 10.1117/12.172606

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<title>Combined scanning optical and force microscope using interferometric detection</title>

C. David Wright

W.W. Clegg

Stone Cheng

et al.

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