Lowest Concentration of Chlorine Trifluoride Gas for Cleaning Silicon Carbide Chemical Vapor Deposition Reactor

Abstract

A dilute chlorine trifluoride gas at less than 1% was possible for the cleaning of a silicon carbide chemical vapor deposition (CVD) reactor. For 20 minutes, the chlorine trifluoride gas at the concentrations of 0.5 - 1 % in ambient nitrogen at atmospheric pressure could detach the 30-m-thick particle-type polycrystalline silicon carbide CVD film from the susceptor which had a coating film made of a purified pyrolytic carbon (PPyC). While the PPyC film had some damage due to the shallow fluorine diffusion, it could be recovered without any pit formation by annealing in ambient nitrogen containing a trace amount of oxygen at atmospheric pressure for 10 minutes at the temperature of 845°C.