Low-Voltage Widely Tunable Photonic Crystal Channel Drop Filter in SOI Wafer

Mudachathi, Renilkumar; Nair, Pradeep R.

doi:10.1109/jmems.2011.2171325

Cited by 10 publications

(6 citation statements)

References 26 publications

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“…KOH-based) etchings have been combined for the fabrication of optical microsystems for telecommunication applications, in which DRIE-etched microsystems with high aspect-ratio are post-processed by KOH etching to improve the surface quality of optical structures. [30][31][32] Though significant improvement of the quality of DRIE-etched surfaces has been demonstrated by KOH post-processing (surface roughness reduced up to one order of magnitude), other drawbacks of dry etching technologies in the out-of-plane direction (e.g. deviation from verticality, lag-etching problems, etc.)…”

Section: Introductionmentioning

confidence: 99%

Optofluidic microsystems with integrated vertical one-dimensional photonic crystals for chemical analysis

et al. 2012

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In this work, we report all-silicon, integrated optofluidic microsystems (OFMs) fabricated by electrochemical micromachining (ECM) technology, in which high aspect-ratio (HAR) photonic crystal (PhC) devices (i.e. micromirrors, optical cavities) are integrated by one-etching-step, together with microfluidic reservoirs/channels, for the infiltration of liquids in the PhC air gaps, and with fiber grooves for alignment/positioning of readout optical fibers in front of the PhC, on the same silicon die. This has not previously been reported in the literature, and opens up new ground in, though not limited to, the optofluidics field, due to the low-cost and high-flexibility of the ECM technology that allows optofluidic microsystem fabrication to be performed in any lab. Optofluidic characterization of PhC-OFMs by both capillary-action and pressure-driven operations is carried out through the measurement of the reflectivity spectra of HAR-PhCs upon injection of liquids featuring different refractive index values in the HAR-PhC air gaps, by using readout optical fibers positioned in the on-chip fiber grooves. High sensitivity and good limit of detection of PhC-OFMs are obtained for both capillary-action and pressure-driven operations. A best sensitivity value of 670 nm/RIU and a worst-case limit of detection of the order of 10(-3) RIU are measured, the former being comparable to state-of-the-art integrated refractive index sensors and the latter being limited by constraints of the experimental setup. The proof of concept about the biosensing potential of PhC-OFMs is given by successfully carrying out a sandwich assay based on antigen-antibody interactions for the detection of the C-reactive protein (CRP) at a concentration value of 10 mg L(-1), which represents the boundary level between physiological and pathological conditions.

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Section: Introductionmentioning

confidence: 99%

Optofluidic microsystems with integrated vertical one-dimensional photonic crystals for chemical analysis

et al. 2012

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“…This can be achieved, for example, by infiltration of the groove with filler with a suitable refractive index. By varying the optical thicknesses of the defects simultaneously, the resonance (or channel) peak positions, λ c , and the Q factor of the coupled resonances obtained can be continuously tuned within the stop band (SB) [ 5 , 18 , 19 ]. For this purpose, the LC is a promising candidate material, with its capability of continuous reverse tuning of the refractive index over a wide range of values by the application of a voltage, V [ 20 ].…”

Section: Methodsmentioning

confidence: 99%

Multi-channel Si-liquid crystal filter with fine tuning capability of individual channels for compensation of fabrication tolerances

Baldycheva

Tolmachev

Berwick³

et al. 2012

Nanoscale Res Lett

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In this study, a technique for the optimization of the optical characteristics of multi-channel filters after fabrication is proposed. The multi-channel filter under consideration is based on a Si photonic crystal (PhC), tunable liquid crystal and opto-fluidic technologies. By filling air grooves in the one-dimensional, Si-Air PhC with a nematic liquid crystal, an efficiently coupled multi-channel filter can be realised in which a wide stop band is used for channel separation over a wide frequency range. By selectively tuning the refractive index in various coupled cavities, continuous individual tuning of the central channel (or edge channels) up to 25% of the total channel spacing is demonstrated. To our knowledge, this is the first report on the electro-optical solution for the compensation of fabrication tolerances in an integrated platform.

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“…This segmented waveguides configuration can also be applied to transduction [ 34 ] and displacement sensing [ 35 ] applications. Other optical switches and filters can also be achieved with a similar segmented waveguides design [ 36 , 37 ].…”

Section: Mems/nems Tunable Si Photonicsmentioning

confidence: 99%

Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators

Chau

Zhou

2016

Micromachines

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This article reviews mechanically-tunable photonic devices with on-chip integrated MEMS/NEMS actuators. With related reports mostly published within the last decade, this review focuses on the tuning mechanisms of various passive silicon photonic devices, including tunable waveguides, couplers, ring/disk resonators, and photonic crystal cavities, and their results are selectively elaborated upon and compared. Applications of the mechanisms are also discussed. Future development of mechanically-tunable photonics is considered and one possible approach is based on plasmonics, which can confine light energy in the nano-scale space. Optomechanics is another innovation, derived from the strong coupling of optical and mechanical degrees of freedom. State-of-the-art studies of mechanically-tunable plasmonics and on-chip optomechanics are also selectively reviewed.

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Low-Voltage Widely Tunable Photonic Crystal Channel Drop Filter in SOI Wafer

Cited by 10 publications

References 26 publications

Optofluidic microsystems with integrated vertical one-dimensional photonic crystals for chemical analysis

Optofluidic microsystems with integrated vertical one-dimensional photonic crystals for chemical analysis

Multi-channel Si-liquid crystal filter with fine tuning capability of individual channels for compensation of fabrication tolerances

Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators

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