Low-temperature synthesis of thermochromic vanadium dioxide thin films by reactive high power impulse magnetron sputtering

Aijaz, Asim; Ji, Yu; Montero, José; Niklasson, Gunnar A.; Granqvist, Claes G.; Kubart, Tomáš

doi:10.1016/j.solmat.2016.01.009

Cited by 71 publications

(29 citation statements)

References 36 publications

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“…The temperature is typically~450 • C although lower temperatures can be used for special sputtering techniques employing pulsed plasma [63][64][65][66][67]. The required process control is difficult, and vanadium is rapidly oxidized at high temperature and transforms from tetragonal VO 2 to V 6 O 13 and V 3 O 7 , and it ultimately reaches thermodynamically stable orthorhombic V 2 O 5 in agreement with the phase diagram in Figure 4 (we come back to this point in Section 4).…”

Section: On the Preparation Of Vanadium Dioxide (Vo2) Thin Films And supporting

confidence: 52%

Thermochromic Oxide-Based Thin Films and Nanoparticle Composites for Energy-Efficient Glazings

Granqvist

Niklasson

2016

Buildings

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Today's advances in materials science and technology can lead to better buildings with improved energy efficiency and indoor conditions. Particular attention should be directed towards windows and glass facades-jointly known as "glazings"-since current practices often lead to huge energy expenditures related to excessive inflow or outflow of energy which need to be balanced by energy-intensive cooling or heating. This review article outlines recent progress in thermochromics, i.e., it deals with materials whose optical properties are strongly dependent on temperature. In particular, we discuss oxide-based thin surface coatings (thin films) and nanoparticle composites which can be deposited onto glass and are able to regulate the throughput of solar energy while the luminous (visible) properties remain more or less unaltered. Another implementation embodies lamination materials incorporating thermochromic (TC) nanoparticles. The thin films and nanocomposites are based on vanadium dioxide (VO 2 ), which is able to change its properties within a narrow temperature range in the vicinity of room temperature and either reflects or absorbs infrared light at elevated temperatures, whereas the reflectance or absorptance is much smaller at lower temperatures. The review outlines the state of the art for these thin films and nanocomposites with particular attention to recent developments that have taken place in laboratories worldwide. Specifically, we first set the scene by discussing environmental challenges and their relationship with TC glazings. Then enters VO 2 and we present its key properties in thin-film form and as nanoparticles. The next part of the article gives perspectives on the manufacturing of these films and particles. We point out that the properties of pure VO 2 may not be fully adequate for buildings and we elaborate how additives, antireflection layers, nanostructuring and protective over-coatings can be employed to yield improved performance and durability that make TC glazings of considerable interest for building-related applications. Finally, we briefly describe recent developments towards TC light scattering and draw some final conclusions.

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Section: On the Preparation Of Vanadium Dioxide (Vo2) Thin Films And supporting

confidence: 52%

Thermochromic Oxide-Based Thin Films and Nanoparticle Composites for Energy-Efficient Glazings

Granqvist

Niklasson

2016

Buildings

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“…Moreover, scaling VO 2 particles to nanoscale offers the possibility to further enhance its thermochromic performance at a moderate τ c . Several chemical and physical techniques have been reported to construct nanostructures of thermochromic VO 2 , including hydrothermal, magnetron sputtering, CVD, PVD, sol–gel, confined‐space combustion method, electrochemical and solution methods . Among them, vapor deposition is an efficient method for high quality VO 2 ‐film fabrication, but the equipment required for the film deposition is usually complex and expensive; a solution‐based deposition process is more cost effective, high‐yielding, and flexible, but it always suffers from multiple‐steps, lower purity, and small‐scale production .…”

Section: Introductionmentioning

confidence: 99%

Hydrothermal Synthesis of VO₂ Polymorphs: Advantages, Challenges and Prospects for the Application of Energy Efficient Smart Windows

Magdassi

Gao

et al. 2017

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Vanadium dioxide (VO ) is a widely studied inorganic phase change material, which has a reversible phase transition from semiconducting monoclinic to metallic rutile phase at a critical temperature of τ ≈ 68 °C. The abrupt decrease of infrared transmittance in the metallic phase makes VO a potential candidate for thermochromic energy efficient windows to cut down building energy consumption. However, there are three long-standing issues that hindered its application in energy efficient windows: high τ , low luminous transmittance (T ), and undesirable solar modulation ability (ΔT ). Many approaches, including nano-thermochromism, porous films, biomimetic surface reconstruction, gridded structures, antireflective overcoatings, etc, have been proposed to tackle these issues. The first approach-nano-thermochromism-which is to integrate VO nanoparticles in a transparent matrix, outperforms the rest; while the thermochromic performance is determined by particle size, stoichiometry, and crystallinity. A hydrothermal method is the most common method to fabricate high-quality VO nanoparticles, and has its own advantages of large-scale synthesis and precise phase control of VO . This Review focuses on hydrothermal synthesis, physical properties of VO polymorphs, and their transformation to thermochromic VO (M), and discusses the advantages, challenges, and prospects of VO (M) in energy-efficient smart windows application.

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“…The ion assistance in reactive HiPIMS has been successfully employed for deposition of various compound thin films with improved properties. For instance to control the phase formation in TiAlN 4 or TiO 2 5 ; reducing the growth temperature of thermochromic VO 2 ; 6,7 controlling the crystal orientation of α-Fe 2 O 3 ; 8 or increasing the value of refractive index of Ta 2 O 5 .…”

Section: Introductionmentioning

confidence: 99%

Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering

Kubart

Aijaz

2017

Journal of Applied Physics

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Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering. The interaction between pulsed plasmas and surfaces undergoing chemical changes complicates physics of reactive High Power Impulse Magnetron Sputtering (HiPIMS). In this study, we determine the dynamics of formation and removal of a compound on titanium surface from the evolution of discharge characteristics in argon atmosphere with nitrogen and oxygen. We show that the time response of a reactive process is dominated by surface processes. Thickness of the compound layer is several nm and its removal by sputtering requires ion fluence in the order of 10 16 cm -2 , much larger than the ion fluence in a single HiPIMS pulse. Formation of the nitride or oxide layer is significantly slower in HiPIMS than in dc sputtering under identical conditions. Further, we explain very high discharge currents in HiPIMS by the formation of truly stoichiometric compound during the discharge off-time. The compound has very high secondary electron emission coefficient and leads to a large increase in the discharge current upon target poisoning. Journal of Applied Physics

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Low-temperature synthesis of thermochromic vanadium dioxide thin films by reactive high power impulse magnetron sputtering

Cited by 71 publications

References 36 publications

Thermochromic Oxide-Based Thin Films and Nanoparticle Composites for Energy-Efficient Glazings

Thermochromic Oxide-Based Thin Films and Nanoparticle Composites for Energy-Efficient Glazings

Hydrothermal Synthesis of VO₂ Polymorphs: Advantages, Challenges and Prospects for the Application of Energy Efficient Smart Windows

Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering

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Low-temperature synthesis of thermochromic vanadium dioxide thin films by reactive high power impulse magnetron sputtering

Cited by 71 publications

References 36 publications

Thermochromic Oxide-Based Thin Films and Nanoparticle Composites for Energy-Efficient Glazings

Thermochromic Oxide-Based Thin Films and Nanoparticle Composites for Energy-Efficient Glazings

Hydrothermal Synthesis of VO2 Polymorphs: Advantages, Challenges and Prospects for the Application of Energy Efficient Smart Windows

Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering

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Hydrothermal Synthesis of VO₂ Polymorphs: Advantages, Challenges and Prospects for the Application of Energy Efficient Smart Windows