Low‐Temperature Synthesis of Silicon Oxynitride‐Doped Si for Tunable Bragg Gratings Homogeneously Deposited on Si, SiO2, and Borosilicate Substrates and the tip of SM and PM Optical Fibers
Abstract:Optical tunability and repeatability are essential in fabricating optoelectronic devices from waveguides to Bragg gratings (BGs) for high-energy, high-power, mode-locking, and sensing applications. For this purpose, a controlled adjustment in the optical properties, including the refractive index of the deposited nanolayers, becomes critical. This study reveals that silicon oxynitride (SiON) doping into silicon (Si) offers a new way for the preparation of novel Si-based devices with an emphasis on the BGs for … Show more
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