Y 3 Al 5 O 12 :Tb 3+ phosphor was prepared by using a sol-gel method and the process of particle growth was investigated by X-ray diffraction, scanning electron microscopy, particle size, and Brunauer-Emmett-Teller surface area measurements. As-dried Y 3 Al 5 O 12 :Tb 3+ precursor is amorphous bulk. After heating above 800°C, the samples become polycrystalline powders. The low-temperature heated sample ͑e.g., 900°C͒ has a porous texture with large particle size ͑Ͼ10 m͒. When the samples are heated at higher temperatures ͑e.g., 1100°C͒, the pores become larger and the grains start to appear. When the samples are heated at 1400°C, the large-size particles break into small particles ͑ϳ1 m͒, which are actually agglomerated particles by even smaller grains ͑in submicrometer scale͒. Under the excitations of the low-voltage cathode ray ͑Ͻ1500 V͒, the phosphor prepared in this sol-gel method has brighter cathodoluminescent intensity than the commercial phosphor.