Low temperature selective NO2 sensors by nanostructured fibres of ZnO

ZnO nanowires grown on SOI CMOS substrate for ethanol sensing

“…7. It was also reported in the literature [9,15] that the ZnO NWs are used as a humidity sensors. So when the measurements were performed in the presence of humidity, it is proposed that ethanol vapour is in competition for sites with the water.…”

“…His research interests include the modelling of silicon microsensors, chemical sensor array devices, biomimetic MEMS devices and electronic noses. He has worked with over 20 companies in the past 15 …”

“…Various nanocrystalline morphologies of ZnO (e.g. nanowire, nanorod) grown for gas sensing using high temperature chemical vapour deposition techniques can also be found in the literature [9][10][11][12][13][14][15][16][17]; however the high temperatures (more than 500 • C) necessary for the growth of ZnO NWs are not suitable for a CMOS substrate. There are a few reports of growing ZnO nanostructures for the purpose of gas sensing using a low temperature hydrothermal method [18][19][20][21][22][23], though these have been deposited on a non-CMOS substrate.…”

“…There are a few reports of growing ZnO nanostructures for the purpose of gas sensing using a low temperature hydrothermal method [18][19][20][21][22][23], though these have been deposited on a non-CMOS substrate. It has also been shown that ZnO thin/thick film nanostructures can detect ethanol vapour [10][11][12][13][14]18,22,23], NO 2 [7,15,16,21], H 2 [12,16,[18][19][20], NH 3 [5,20], humidity [9,15] and oxygen [17], however most of the measurements were carried out in dry air.…”

Uniform ZnO nanorods can be used to improve the response of ZnO gas sensor

“…As one of the first gas-sensing materials [25], ZnO has many advantages compared with the other materials, such as low-cost and facile to synthesize. Especially, 1D ZnO nanostructures have a high surface-to-volume ratio, which can overcome the limitations of the commercial sensors, such as high temperature detection limit, and lack of long-term stability [26][27][28][29]. A large number of literatures based on 1D ZnO nanostructures gas sensors have been published in the past several years [18,28,[30][31][32].…”