2013
DOI: 10.1063/1.4789942
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Low-temperature indium-bonded alkali vapor cell for chip-scale atomic clocks

Abstract: A low-temperature sealing technique for micro-fabricated alkali vapor cells for chip-scale atomic clock applications is developed and evaluated. A thin-film indium bonding technique was used for sealing the cells at temperatures of 140 C. These sealing temperatures are much lower than those reported for other approaches, and make the technique highly interesting for future micro-fabricated cells, using anti-relaxation wall coatings. Optical and microwave spectroscopy performed on first indium-bonded cells with… Show more

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Cited by 31 publications
(20 citation statements)
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References 30 publications
(37 reference statements)
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“…However, no drift of the clock resonance frequency could be shown. Straessle et al 18 discussed permeation of Nitrogen buffer gas into their Rb micro-cells to assess the hermiticity of micro-cells.…”
mentioning
confidence: 99%
See 1 more Smart Citation
“…However, no drift of the clock resonance frequency could be shown. Straessle et al 18 discussed permeation of Nitrogen buffer gas into their Rb micro-cells to assess the hermiticity of micro-cells.…”
mentioning
confidence: 99%
“…Expected permeation rates, time constants, and initial linear drift of intrinsic cell frequency due to permeation are given, calculated for the microfabricated Cs-Ne cell under study (see below), using P in ¼ 60 mbar and the Ne pressure shift coefficient of 530 Hz/mbar. 26 Because K for permeation of both He and Ne through Si 27 is several orders of magnitude smaller than through borosilicate glass, 18,24 one can neglect the Si parts of the cell here and treat s of Eq. (2) applying to the cell's borofloat windows only.…”
mentioning
confidence: 99%
“…The evolved cell pressure P with time t can be derived from the internal and external pressures, as well as cell cavity volume V . The proportional relationship is given as [ 52 ]: where L is the leak rate, P norm is the normalized pressure of 1 × 10 5 Pa and P ext is the external pressure of 1 atm. By solving Equation (2), the pressure can be expressed as: where the initial pressure in the beginning is 10 −3 Pa depending on EVG510.…”
Section: Resultsmentioning
confidence: 99%
“…MEMS alkali vapor cell technology, utilizing eutectic bonding, has been investigated for years [65,66,67,68,69,70]. According to this technology, the silicon–glass preform and glass cover, kept at a distance, are located in the vacuum chamber.…”
Section: Methods Of Mems Vapor Cell Fabricationmentioning
confidence: 99%