Low-Temperature Growth of Nanocrystalline Diamond by Reactive Pulsed Laser Deposition under a Hydrogen Atmosphere

Yoshitake, Tsuyoshi; Hara, T.; Fukugawa, Tomohito; Zhu, Ling yun; Itakura, Masaru; Kuwano, Noriyuki; Tomokiyo, Yoshitsugu; Nagayama, Kazuaki

doi:10.1143/jjap.43.l240

Cited by 16 publications

(4 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Ultrananocrystalline diamond (UNCD) films comprising diamond crystallites with diameters less than 10 nm and an amorphous carbon matrix [1,2] have attracted considerable attention from the physical and technological viewpoints because of the following features: (i) some properties resembling those of diamond and sp 3 -rich amorphous carbon, so-called diamond-like carbon (DLC); (ii) smooth surface [3], which is contrastive to that of polycrystalline diamond; (iii) higher temperature stability as compared to that of DLC; (iv) unique optical and electrical properties owing to a large number of grain boundaries in the film [4]. Here, the grain boundaries exactly mean the interfaces between UNCDs and between an amorphous carbon matrix and UNCDs.…”

Section: Introductionmentioning

confidence: 99%

Near-Edge X-Ray Absorption Fine Structure of Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Films Prepared by Pulsed Laser Deposition

Ohmagari

Yoshitake

Nagano

et al. 2009

Journal of Nanomaterials

Self Cite

View full text Add to dashboard Cite

The atomic bonding configuration of ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon (a-C:H) films prepared by pulsed laser ablation of graphite in a hydrogen atmosphere was examined by near-edge X-ray absorption fine structure spectroscopy. The measured spectra were decomposed with simple component spectra, and they were analyzed in detail. As compared to the a-C:H films deposited at room substrate-temperature, the UNCD/a-C:H and nonhydrogenated amorphous carbon (a-C) films deposited at a substrate-temperature of exhibited enhanced and peaks. At the elevated substrate-temperature, the and bonds formation is enhanced while the C–H and C–C bonds formation is suppressed. The UNCD/a-C:H film showed a larger C–C peak than the a-C film deposited at the same elevated substrate-temperature in vacuum. We believe that the intense C–C peak is evidently responsible for UNCD crystallites existence in the film.

show abstract

Section: Introductionmentioning

confidence: 99%

Near-Edge X-Ray Absorption Fine Structure of Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Films Prepared by Pulsed Laser Deposition

Ohmagari

Yoshitake

Nagano

et al. 2009

Journal of Nanomaterials

Self Cite

View full text Add to dashboard Cite

show abstract

“…It is well known that C 2 dimers have an important role in the growth of UNCD films by CVD [6]. Recently, we have succeeded in growing UNCD films, wherein 5-nm diamond crystallites are embedded in a hydrogenated amorphous carbon (a-C:H) matrix, in a hydrogen atmosphere by pulsed laser deposition (PLD) with a graphite target [7,8]. They can be grown at low substrate temperatures and high deposition rates.…”

Section: Introductionmentioning

confidence: 99%

Time-Resolved Observation of Deposition Process of Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films in Pulsed Laser Deposition

Yoshitake

Hanada

Nishiyama

et al. 2009

Journal of Nanomaterials

Self Cite

View full text Add to dashboard Cite

Optical emission spectroscopy was used to study pulsed laser ablation of graphite in a hydrogen atmosphere wherein ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon (a-C:H) composite films were grown on heated substrates. Time-resolved photographs of a plume that expanded from a laser-irradiation spot toward a substrate were taken using a high-speed ICCD camera equipped with narrow-bandpass filters. While the emissions from C atoms and dimers lasted above the laser-irradiation spot on the target, the emission from ions lasted above the substrate surface for approximately 7 microseconds, although the emission lifetime of species is generally approximately 10 nanoseconds. This implies that ions actively collided with each other above the substrate surface for such a long time. We believe that the keys to UNCD growth in PLD are the supply of highly energetic carbon species at a high density to the substrate and existence of atomic hydrogen during the growth.

show abstract

“…9,10 In addition to CVD methods, the growth of films of diamond has been attempted via physical vapor deposition (PVD) routes. These include pulsed laser ablation, 11,12 ion beam evaporation, 13 magnetron sputtering, 14 and, very recently, pulsed electron beam ablation (PEBA). 15,16 PEBA advantages over other PVD methods include the highly energetic electron beam, non-thermal equilibrium ablation of virtually all kinds of materials, highly energetic plasma plume, process scalability, low capital/operating cost, and small equipment footprint.…”

mentioning

confidence: 99%

Hydrogen-Free Deposition of Nanocrystalline Diamond by Channel-Spark Electron Beam Ablation

Alshekhli

Henda

2014

ECS J. Solid State Sci. Technol.

View full text Add to dashboard Cite

We report on the preparation of hydrogen-free nanocrystalline diamond films by pulsed electron beam ablation (channel-spark) from a single target on silicon and stainless steel substrates and under different process conditions. The films have been grown from highly ordered pyrolytic graphite at room temperature in an argon atmosphere under a pressure of 0.6 Pa. This study aims at elucidating the influence of the accelerating voltage (13, 14.5, and 16 kV) and electron beam pulse repetition rate (5 and 8 Hz) on film morphology, grain size, carbon-carbon sp 3 content, and crystalline fraction. The films have been characterized using visible-reflectance spectroscopy, visible-Raman spectroscopy, scanning electron microscopy (SEM), and atomic force microscopy (AFM). The correlations between measurement data and film properties are examined and discussed.Diamond has a set of technologically attractive properties such as its extraordinarily high hardness and thermal conductivity, low friction coefficient, high stiffness, excellent electrical resistivity, high energy-bandgap, and excellent chemical stability. The preparation of artificial diamond has been an ongoing effort for over 100 years. One early and tangible effort is due to Hershey, in late 1920s, who claimed to have made diamond from the rapid freezing of excess carbon dissolved in molten iron. 1 Many attempts have ensued, which are based on high-pressure and high-temperature conditions and culminated in the commercial synthesis of diamond from graphite by ASEA in Sweden 2 and General Electric. 3 In the early 1960s, diamond films were produced by the pyrolysis of methane over a diamond substrate. 4 Further successful attempts, throughout the 1970s-1980s, have been reported at producing films of diamond via chemical vapor deposition (CVD) from carbonaceous gas mixtures and hydrogen (or other halogens), e.g., see 5,6 for a comprehensive account. The growth of diamond films continues to attract intensive worldwide attention by the research community, as high-quality films exhibit most of the unsurpassed properties of natural diamond and they are much more cost effective.Nanocrystalline diamond (NCD) is a nano-composite consisting of nanometer-sized diamond crystallites, which are surrounded by an amorphous carbon matrix. The diamond crystallites are made up of sp 3 hybridized carbon bonded atoms, while the amorphous carbon phase consists of both sp 3 and sp 2 hybridized carbon atoms (and eventually hydrogen, in case of deposition in a hydrogen-rich atmosphere). The interfacial region of these two phases consists of a less-distinguishable phase or the grain boundaries. The latter and the amorphous carbon matrix could be considered as one phase due to the small volumes, i.e., < 10%, of the amorphous carbon regions. 7,8 NCD films, with their smooth surface and high sp 3 C-C bond content, are promising candidates in a broad range of applications, such as such as in optics, tribology, biomedicine, and catalysis. 9,10 In addition to CVD methods, the growth of films of dia...

show abstract

Low-Temperature Growth of Nanocrystalline Diamond by Reactive Pulsed Laser Deposition under a Hydrogen Atmosphere

Cited by 16 publications

References 2 publications

Near-Edge X-Ray Absorption Fine Structure of Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Films Prepared by Pulsed Laser Deposition

Near-Edge X-Ray Absorption Fine Structure of Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Films Prepared by Pulsed Laser Deposition

Time-Resolved Observation of Deposition Process of Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films in Pulsed Laser Deposition

Hydrogen-Free Deposition of Nanocrystalline Diamond by Channel-Spark Electron Beam Ablation

Contact Info

Product

Resources

About