Low temperature growth of carbon nanotubes on Si substrates in high vacuum

Tanioku, Kenji; Maruyama, Toru; Naritsuka, Shigeya

doi:10.1016/j.diamond.2007.10.028

Cited by 41 publications

(40 citation statements)

References 15 publications

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“…As shown in Fig. 1(b), at 700 ºC, the G band intensity reached its maximum under an optimal pressure of 1×10 -3 Pa, which confirms that the optimal pressure was considerably lower than that in the SWNT growth with a Co catalyst [5]. It should be noted that distinct RBM peaks were observed even at 500 ºC, using a Pt catalyst, indicating that SWNTs grew at this temperature.…”

Section: Methodsmentioning

confidence: 51%

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Growth of Single-Walled Carbon Nanotubes from Pt catalysts by the Alcohol Gas Source Method under Low Ethanol Pressure: Growth Temperature Dependence

Maruyama

Kondo

Fukuoka

et al. 2013

Trans. Mat. Res. Soc. Japan

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The growth of single-walled carbon nanotubes (SWNTs) was carried out on SiO 2 /Si substrates with Pt catalysts between 500 and 800ºC under various ethanol pressures using an alcohol gas source method, a type of cold-wall chemical vapor deposition (CVD). The grown SWNTs were characterized by Raman spectroscopy, scanning electron microscopy (SEM) and transmission electron microscopy (TEM). Irrespective of the growth temperature, the optimal ambient ethanol pressures were between 1×10 -4 and 1×10 -2 Pa. In the SWNT growth at 700ºC, Raman results showed that the diameters of SWNTs grown with Pt catalysts were below 1.4 nm, which was much smaller than that grown with conventional Co catalyst, and that the diameters of SWNTs from Pt decreased as the growth temperature was reduced. In addition, we observed that the catalyst lifetime of Pt was longer than Co. We demonstrated that Pt is an efficient catalyst to grow SWNTs with small diameters.

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Section: Methodsmentioning

confidence: 51%

“…These results confirm that the optimal pressure decreased as the growth temperature was reduced, and that the Pt catalyst is suitable for SWNT growth at low pressure. The tendency that the optimal ethanol pressure increased with the growth temperature is also observed in the SWNT growth with a Co catalyst [5]. Fig.…”

Section: ×10mentioning

confidence: 59%

Growth of Single-Walled Carbon Nanotubes from Pt catalysts by the Alcohol Gas Source Method under Low Ethanol Pressure: Growth Temperature Dependence

Maruyama

Kondo

Fukuoka

et al. 2013

Trans. Mat. Res. Soc. Japan

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“…In the RBM region, several peaks were observed, indicating that most of the grown CNTs were SWNTs. As shown in Figure 2(b), the G band intensity reached its maximum under an ethanol pressure of 1 × 10 −3 Pa, which indicates that the optimal pressure was considerably lower than that in the SWNT growth with Co catalyst, as reported in our previous papers [9].…”

Section: Resultsmentioning

confidence: 74%

Low Temperature Growth of Single-Walled Carbon Nanotubes from Pt Catalysts under Low Ethanol Pressure by Alcohol Gas Source Method

Kondo

Fukuoka

Maruyama

2012

Journal of Nanotechnology

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Growth of single-walled carbon nanotubes (SWNTs) was carried out on SiO 2 /Si substrates with Pt catalysts at 400, 450, and 700• C under various ethanol pressures using an alcohol gas source method in a high vacuum, and the grown SWNTs were characterized by scanning electron microscopy (SEM) and Raman spectroscopy. Irrespective of the growth temperature, both G band and RBM peaks were observed in the Raman spectra under the optimal ethanol pressure (∼ 1 × 10 −3 Pa), indicating that SWNTs grew below 450• C from Pt. At 400 • C, both average diameter and diameter distribution were drastically reduced, and those were fairly smaller and narrower, compared to those for SWNTs grown with Co.

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“…For example, in some experimental settings they work as the carrier gas to bring the catalyst into the reaction chamber [54]. Moreover, except few special processes which require ultra-high vacuum (UHV) condition [52,62], most of the low-temperature CVD growth can progress in a broad pressure range (even in atmospheric pressure [64,67,71]). Therefore, the growth is often accompanied with cocking and the generation of a large amount of organic byproducts.…”

Section: Gas Compositionmentioning

confidence: 99%

One-Dimensional Carbon Nanostructures: Low-Temperature Chemical Vapor Synthesis and Applications

Yang

Jiang

2016

Carbon Nanoparticles and Nanostructures

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Chemical vapor deposition (CVD) is a powerful method to synthesize various carbon nanostructures (e.g., carbon nanotubes). A conventional CVD process has to be carried out at the temperatures over 600°C. To extend the applications of carbon nanostructures, for example in the semiconductor industry, low-temperature synthesis processes are thus always pursued. In this chapter we review the CVD growth of carbon nanostructures at low temperatures (<450°C). These growth processes are discussed in detail with respect to the applied catalyst system, carbon source, reaction atmosphere, catalyst faces, morphology control as well as unique structural characteristics of grown products. For the low-temperature CVD growth, catalytic reaction occurring on the low index faces of a metal catalyst is a crucial issue, and the growth is rate-limited by surface diffusion. Instead of the classical Vapor-Liquid-Solid (VLS) growth mechanism, the growth mechanism at low temperatures is interpreted with a novel Vapor-Facet-Solid (VFS) mechanism. Due to their unique features, the synthesized carbon nanostructures are promising to be applied for interconnects in large-scale integrated circuits, field emission, microwave adsorption, and as the anode material of lithium ion secondary battery, etc.

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Low temperature growth of carbon nanotubes on Si substrates in high vacuum

Cited by 41 publications

References 15 publications

Growth of Single-Walled Carbon Nanotubes from Pt catalysts by the Alcohol Gas Source Method under Low Ethanol Pressure: Growth Temperature Dependence

Growth of Single-Walled Carbon Nanotubes from Pt catalysts by the Alcohol Gas Source Method under Low Ethanol Pressure: Growth Temperature Dependence

Low Temperature Growth of Single-Walled Carbon Nanotubes from Pt Catalysts under Low Ethanol Pressure by Alcohol Gas Source Method

One-Dimensional Carbon Nanostructures: Low-Temperature Chemical Vapor Synthesis and Applications

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