Low temperature growth of c-axis oriented AlN films on γ-LiAlO2 by radio frequency magnetron sputtering

Teng, Hao; Zhou, Shengming; Lin, Hui; Huang, Taohua; Han, Ping; Zhang, Rong

doi:10.1016/j.jallcom.2008.01.104

Journal of Alloys and Compounds

2009

DOI: 10.1016/j.jallcom.2008.01.104

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Low temperature growth of c-axis oriented AlN films on γ-LiAlO2 by radio frequency magnetron sputtering

Hao Teng

Shengming Zhou

Hui Lin

et al.

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Low temperature growth of c-axis oriented AlN films on γ-LiAlO2 by radio frequency magnetron sputtering

Cited by 1 publication

References 21 publications

Planar Waveguides in γ-LiAlO2 With Ion Implantation: Light Being Facilely Propagated

Planar Waveguides in γ-LiAlO2 With Ion Implantation: Light Being Facilely Propagated

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