Low temperature grown carbon nanotube interconnects using inner shells by chemical mechanical polishing

Yokoyama, Daisuke; Iwasaki, Takayuki; Yoshida, Teru; Kawarada, Hiroshi; Sato, Shintaro; Hyakushima, Takashi; Nihei, Misato; Awano, Yuji

doi:10.1063/1.2824390

Cited by 109 publications

(86 citation statements)

References 16 publications

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“…• C) [3]. By contrast, recent reports of CVD growth using O 2 gas [4] and water vapor [5] as an additive to CH 4 and C 2 H 4 , respectively, provide an enormous advantage in long CNT growth with high yields.…”

Section: Introductionmentioning

confidence: 79%

Carbon-Nanotube Growth in Alcohol-Vapor Plasma

Suda

Okita

Takayama

et al. 2009

IEEE Trans. Plasma Sci.

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Abstract-We have successfully grown carbon nanotubes (CNTs) by plasma-enhanced chemical vapor deposition (PECVD) using alcohol. When 0.01-wt% ferrocene was added to the alcohol, vertically aligned CNTs grew at 650• C. By contrast, a few CNTs and mostly carbon nanoparticles were obtained by pure alcohol PECVD even though the Fe catalyst was coated on Si substrates. Comparing this PECVD experiment with thermal alcohol CVD showed that only the PECVD method can be used to grow CNTs under the reported experimental conditions. To understand the plasma properties for CNT growth, particularly plasma species contained in a gas phase of alcohol plasma, the plasma was analyzed using optical-emission spectroscopy (OES) and quadrupole mass spectrometry (QMS). From the OES measurement, emission peaks from the excitation states of C 2 , CH, CHO, CH 2 O, CO, H, O 2 , C + , and CO + were identified, while the QMS measurement also showed the existence of H 2 , O, and CO. These results indicate that, in alcohol plasma, oxidants and reductants exist together and potentially promote/suppress CNT growth depending on the process conditions. The contribution of C x H y (x ≥ 1, y ≥ 3) radicals, which were produced by decomposition reactions in alcohol plasma as a CNT precursor, is discussed. Index Terms-Carbon nanotube (CNT), ferrocene, mass spectrometry, optical-emission spectroscopy (OES), plasma-enhanced chemical vapor deposition (PECVD).

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Section: Introductionmentioning

confidence: 79%

Carbon-Nanotube Growth in Alcohol-Vapor Plasma

Suda

Okita

Takayama

et al. 2009

IEEE Trans. Plasma Sci.

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“…Selective growth of multiwall carbon nanotubes (MWCNTs) in vias has been previously demonstrated using conventional CVD or plasma-assisted CVD methods in the temperature range of 390-700 o C. 1,13,14 However, CNTs growth in the lower temperature range of 390-550 o C tends to result in a higher concentration of structural defects 13,15 which in turn, introduce more scattering centers. In addition, the growth rate of nanotubes on metal (conductive) substrates in the lower temperature range is typically very low (0.05 -0.16 μm/min) 16 .…”

mentioning

confidence: 99%

Efficient Coupling of Optical Energy for Rapid Catalyzed Nanomaterial Growth: High-Quality Carbon Nanotube Synthesis at Low Substrate Temperatures

Ahmad

Anguita

Stolojan

et al. 2013

ACS Appl. Mater. Interfaces

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“…exploring a wide range of catalysts, such as bimetallic nanoparticles and oxide with low melting point; 1,5,6,3. introducing plasma during deposition with the scope of increasing the dissociation and ionization of feeding gases and at the same time decreasing the activation energy of the CNT growth.…”

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confidence: 99%

High-rate low-temperature growth of vertically aligned carbon nanotubes

et al. 2010

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We report the high-rate and low-temperature growth of vertically aligned carbon nanotubes (CNTs) by a photo-thermal chemical vapour deposition (PTCVD) method using a Ti/Fe bi-layer film as the catalyst. The growth temperature is as low as 370 °C and the growth rate is up to 1.3 μm/min, at least 8 times faster than the reported values by traditional thermal CVD methods. Transmission electron microscopy observations reveal that as-grown CNTs are uniformly made of crystalline 5 − 6 graphene shells with an approximately 10 nm outer diameter and a 5 − 6 nm inner diameter. The low-temperature rapid growth of CNTs is strongly related with the unique top-down heating mode of PTCVD and the formation of Ti/Fe bimetallic solid solution. The present study will advance the deployment of CNTs as interconnects in nanoelectronics, through a CMOS-compatible low-temperature deposition method.

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Low temperature grown carbon nanotube interconnects using inner shells by chemical mechanical polishing

Cited by 109 publications

References 16 publications

Carbon-Nanotube Growth in Alcohol-Vapor Plasma

Carbon-Nanotube Growth in Alcohol-Vapor Plasma

Efficient Coupling of Optical Energy for Rapid Catalyzed Nanomaterial Growth: High-Quality Carbon Nanotube Synthesis at Low Substrate Temperatures

High-rate low-temperature growth of vertically aligned carbon nanotubes

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