Low Temperature Diamond Deposition On Glass

Liou, Y.; Inspektor, A.; Knight, Diane S.; Weimer, R. A.; Pickrell, David; Badzian, Andrzej; Messier, R.

doi:10.1117/12.962057

Cited by 9 publications

(2 citation statements)

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“…In contrast to rough polycrystalline diamond films, for which a polishing process is necessary to reach the surface smoothness needed for most of optical applications, nanocrystalline diamond (NCD) films have the advantage of providing an as-grown smooth surface that does not require a time-consuming post-deposition polishing process owing to a very small grain size (5-20 nm) [9,10] which is independent of the film thickness [11]. Moreover, these films can be deposited at low temperatures, which permits the deposition on low-melting-point substrates such as various types of glasses [12]. However, the presence of non-diamond phases, more specifically graphitic sp 2 phases, in the NCD films can drastically affect their optical characteristics by causing absorption.…”

Section: Introductionmentioning

confidence: 99%

Synthesis of High Quality Transparent Nanocrystalline Diamond Films on Glass Substrates Using a Distributed Antenna Array Microwave System

et al. 2022

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Diamond is a material of choice for the fabrication of optical windows and for protective and anti-reflecting coatings for optical materials. For these kinds of applications, the diamond coating must have a high purity and a low surface roughness to guarantee a high transparency. It should also be synthesized at low surface temperature to allow the deposition on low melting-point substrates such as glasses. In this work, the ability of a Distributed Antenna Array (DAA) microwave system operating at low temperature and low pressure in H2/CH4/CO2 gas mixture to synthesize nanocrystalline diamond (NCD) films on borosilicate and soda-lime glass substrates is investigated aiming at optical applications. The influence of the substrate temperature and deposition time on the film microstructure and optical properties is examined. The best film properties are obtained for a substrate temperature below 300 °C. In these conditions, the growth rate is around 50 nm·h−1 and the films are homogeneous and formed of spherical aggregates composed of nanocrystalline diamond grains of 12 nm in size. The resulting surface roughness is then very low, typically below 10 nm, and the diamond fraction is higher than 80%. This leads to a high transmittance of the NCD/glass systems, above 75%, and to a low absorption coefficient of the NCD film below 103 cm−1 in the visible range. The resulting optical band gap is estimated at 3.55 eV. The wettability of the surface evolves from a hydrophilic regime on the bare glass substrates to a more hydrophobic regime after NCD deposition, as assessed by the increase of the measured contact angle from less than 55° to 76° after the deposition of 100 nm thick NCD film. This study emphasizes that such transparent diamond films deposited at low surface temperature on glass substrate using the DAA microwave technology can find applications for optical devices.

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Section: Introductionmentioning

confidence: 99%

Synthesis of High Quality Transparent Nanocrystalline Diamond Films on Glass Substrates Using a Distributed Antenna Array Microwave System

et al. 2022

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“…Since this removal rate is close to the net growth rate, oxidation by OH could be critical. For example, Liou et al showed[20] that with 02 present good quality diamond can be grown at temperatures as low as 700 K, whereas without 02 present a mixture of mostly pyrolytic carbon with perhaps traces of diamond would have grown. Our results suggest that under their conditions pyrolytic carbon was removed by attack from OH, so that the remaining film was made from diamond alone.Units are concentration in parts per thousand.…”

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confidence: 99%

Effects of Oxygen on Diamond Growth

Harris

Weiner

1989

MRS Proc.

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In situ mass spectral measurements of the gas composition at the substrate surface were made during filament-assisted diamond growth. The input gases were various mixtures of CH 4 , 02, and H 2 chosen in order to discern the effects of oxygen addition on diamond formation and growth. The gas phase chemistry was modeled as a 1-dimensional flow reactor, and the measured and calculated species mole fractions were in good agreement. The model was then used to estimate mole fractions of several atomic and radical species which could not be measured. We fEnd that addition of 02 has only a small effect on the radical mole fractions. However, 02 can reduce the effective initial hydrocarbon mole fraction, which is important because higher quality diamond is grown at lower initial hydrocarbon mole fraction. Most importantly, perhaps, 02 addition leads to the formation of sufficient gas phase OH to remove non-diamond (pyrolytic) carbon from the film. Thus, 02 addition allows diamond films to be grown under composition and temperature conditions which otherwise would produce largely non-diamond carbon.

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Characterization and Properties of Artificially Grown Diamond

Bachmann¹,

Wiechert²

1991

Diamond and Diamond-Like Films and Coatings

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Low Temperature Diamond Deposition On Glass

Cited by 9 publications

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Synthesis of High Quality Transparent Nanocrystalline Diamond Films on Glass Substrates Using a Distributed Antenna Array Microwave System

Synthesis of High Quality Transparent Nanocrystalline Diamond Films on Glass Substrates Using a Distributed Antenna Array Microwave System

Effects of Oxygen on Diamond Growth

Characterization and Properties of Artificially Grown Diamond

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