Low-temperature conductivity of ZnO films prepared by chemical vapor deposition

Natsume, Y.; Sakata, H.; Hirayama, Toru; Yanagida, Hiroaki

doi:10.1063/1.352231

Cited by 152 publications

(63 citation statements)

References 25 publications

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“…As the conduction mechanism of the ZnO is controlled by interstitial Zn atoms or O vacancies [1,18,19], it would be expected that films deposited at various oxygen pressures will exhibit different conductivities. In Fig.…”

Section: Resultsmentioning

confidence: 99%

Effects of laser wavelength and fluence on the growth of ZnO thin films by pulsed laser deposition

Crăciun

Amirhaghi

Crǎciun

et al. 1995

Applied Surface Science

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Transparent, electrically conductive and c-axis oriented ZnO thin films have been grown by the pulsed laser deposition (PLD) technique on silicon and Coming glass substrates employing either a KrF excimer laser (3. = 248 nm) or a frequency-doubled Nd:YAG laser (3. = 532 rim). The crystalline structure, surface morphology, optical and electrical properties of the deposited films were found to depend not only on the substrate temperature and oxygen partial pressure, but also on the irradiation conditions. The quality of the ZnO layers grown by the shorter wavelength laser was always better than that of the layers grown by the longer wavelength, under otherwise identical deposition conditions. This behaviour was qualitatively accounted for by the results of the numerical solution of a one-dimensional heat diffusion equation which indicated a strong superheating effect of the melted target material for the case of frequency-doubled Nd:YAG laser irradiations. By optimizing the deposition conditions we have grown, employing the KrF laser, very smooth c-axis oriented ZnO films having a full-width at half-maximum value of the (002) X-ray diffraction value less than 0.16 ° and optical transmittance around 85% in the visible region of the spectrum at a substrate temperature of only 300°C.

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Section: Resultsmentioning

confidence: 99%

Effects of laser wavelength and fluence on the growth of ZnO thin films by pulsed laser deposition

Crăciun

Amirhaghi

Crǎciun

et al. 1995

Applied Surface Science

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“…Zinc−oxide nanoparticles have been synthesized by several methods such as chemical vapour deposition [8], sol−gel method [9], spray pyrolysis [10], hydrothermal method, etc. [11][12][13].…”

Section: Introductionmentioning

confidence: 99%

Photoluminescence and photoconductive characteristics of hydrothermally synthesized ZnO nanoparticles

Mishra

Srivastava

Prakash

et al. 2010

Opto-Electronics Review

143

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In the present paper, ZnO nanoparticles (NPs) with particle size of 20–50 nm have been synthesized by hydrothermal method. UV-visible absorption spectra of ZnO nanoparticles show absorption edge at 372 nm, which is blue-shifted as compared to bulk ZnO. Photoluminescence (PL) and photoconductive device characteristics, including field response, light intensity response, rise and decay time response, and spectral response have been studied systematically. The photoluminescence spectra of these ZnO nanoparticles exhibited different emission peaks at 396 nm, 416 nm, 445 nm, 481 nm, and 524 nm. The photoconductivity spectra of ZnO nanoparticles are studied in the UV-visible spectral region (366–691 nm). In spectral response curve of ZnO NPs, the wavelength dependence of the photocurrent is very close to the absorption and photoluminescence spectra. The photo generated current, Ipc = (Itotal - Idark) and dark current Idc varies according to the power law with the applied field IpcαVr and with the intensity of illumination IpcαIL r, due to the defect related mechanism including both recombination centers and traps. The ZnO NPs is found to have deep trap of 0.96 eV, very close to green band emission. The photo and dark conductivities of ZnO NPs have been measured using thick film of powder without any binder.

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“…It has many attractive properties such as low toxicity, high conductivity, high transmittance in visible region, and high infrared reflectance. A variety of methods have been used to prepare ZnO films such as thermal evaporation [5], rf sputtering [6], CVD [7], and pulsed laser deposition [8]. In addition to these techniques chemical spray pyrolysis (CSP) technique has received attention due to its simplicity and consequent economics aspect as it does not require high vacuum equipments, and another attractive point is the possibility of production of large-area films.…”

Section: Introductionmentioning

confidence: 99%

Preparation and characteristics study of ZnO: (Al, Cu, I) thin films by chemical spray pyrolysis

Ismail

Al-Naimi

Al-Ani

2006

e-J. Surf. Sci. Nanotechnol.

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Spray pyrolysis deposition technique has been used to grow ZnO thin films doped with different dopant species (Al, Cu, I). The optical and electrical properties of films were investigated as function of dopant type and concentration. The structural characteristics of undoped and doped ZnO films were studied using X-ray diffraction (XRD). The electrical resistivity as low as 4 × 10 −2 Ωcm was obtained for ZnO:Al with 5 at.% dopant concentration. ZnO:Cu films prepared at specific conditions exhibited p-type conductivity. The optical band gap of doped ZnO films varied from 3.09 eV to 3.2 eV. XRD investigation confirmed that the doped ZnO films had preferred orientation in the direction of (101) plane.

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Low-temperature conductivity of ZnO films prepared by chemical vapor deposition

Cited by 152 publications

References 25 publications

Effects of laser wavelength and fluence on the growth of ZnO thin films by pulsed laser deposition

Effects of laser wavelength and fluence on the growth of ZnO thin films by pulsed laser deposition

Photoluminescence and photoconductive characteristics of hydrothermally synthesized ZnO nanoparticles

Preparation and characteristics study of ZnO: (Al, Cu, I) thin films by chemical spray pyrolysis

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