Low temperature co-fired ceramics plasma generator for atmospheric pressure gas spectroscopy

Macioszczyk, Jan; Malecha, Karol; Roguszczak, Henryk; Patela, S.; Gołonka, Leszek

doi:10.1016/j.sna.2015.01.011

Cited by 3 publications

(3 citation statements)

References 28 publications

(27 reference statements)

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“…In the next step, we have investigated impact of different generators on the discharge spectra. As a reference, we used data obtained from vertical DBD generator presented in Macioszczyk et al (2015). Spectra were recorded using StellarNet SILVER-Nova spectrometer.…”

Section: Resultsmentioning

confidence: 99%

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The LTCC device for miniature plasma generators characterization

Macioszczyk

Malecha

Gołonka

2016

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Purpose The purpose of this paper is a presentation of a miniature vertical dielectric barrier discharge (DBD) plasma generators. The presented devices, with sub- and superstrate, were made using low temperature co-fired ceramics (LTCC). Such construction allowed to measure discharge spectra and device temperature easily. Design/methodology/approach The generators were made in the Du Pont 951 system with silver vertical metallizations and PdAg contacts. The devices had electrodes with different width and height. Also, the distance between them could be established. They were placed on substrate with buried temperature sensor and covered with a ceramic lid. The lid had opening to measure emitted light. Different configurations of vertical DBD were tested. Findings Geometry of vertical metallizations influences on spectra, as well as distance between them. Signal-to-noise ratio had a maximum for certain generators and can be measured by the intensity of highest peak. Research limitations/implications Height of vertical metallizations is limited by the difference in shrinkage of LTCC tape and via paste. Parameters of temperature sensors vary between measurements, according to rapid changes of temperature and presence of strong electric field. Practical implications The generators can be used for creating discharge for optical emission spectrometry. It is a convenient method to determine the amount of selected gas compounds. Originality/value This paper shows fabrication and performance of the novel vertical DBD generators with ceramic additions for convenient spectra measurement and monitoring temperature of the device during work.

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Section: Resultsmentioning

confidence: 99%

“…Still, the problem was overheating of structure (in air it reaches above 200°C). Weak point of this design was also optical connection – optical fiber was susceptible to mechanical damages and easily breaks (Macioszczyk et al , 2015).…”

Section: Introductionmentioning

confidence: 99%

The LTCC device for miniature plasma generators characterization

Macioszczyk

Malecha

Gołonka

2016

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“…An LTCC DBD generator was made of DuPont 951 tape [40]. It consisted of two electrodes covered with a dielectric, the discharge chamber between them, the inlet and outlet of working gas.…”

Section: Modification Of Water Propertiesmentioning

confidence: 99%

Metrology and Measurement Systems

Macioszczyk,

Golonka

2019

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In this paper the current status of microplasma devices and systems made in the LTCC technology is presented. The microplasma characteristics and applications are described. We discuss the properties of the LTCC materials, that are necessary for reliable operation of the sources. This material is well known for its good reliability and durability in harsh conditions. Still, only a few examples of such microplasma sources are described. Some of them have been developed by the authors and successfully used for chemical analysis and synthesis.

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LTCC Breakdown Voltage Investigation

Dorczyński

Fabinska

Roguszczak

et al. 2016

Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT)

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High voltage properties of the LTCC (Low Temperature Co-Fired Ceramics) cofired ceramic tape are presented. Chauvin Arnoux C.A. 6555 insulation tester is used to measure the leakage current and the resistance. Measurement is possible up to 15 kV. The DuPont 951 test structures are manufactured. The electrodes are fabricated of Ag (DP 6142) and PdAg (DP 6146) pastes. The leakage current dependence upon the temperature up to 320°C is measured. The ceramics properties depend on the temperature, especially beyond 200°C. Moreover, the current characteristics as a function of electrical field are presented and the breakdown voltage is determined.

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Low temperature co-fired ceramics plasma generator for atmospheric pressure gas spectroscopy

Cited by 3 publications

References 28 publications

The LTCC device for miniature plasma generators characterization

The LTCC device for miniature plasma generators characterization

Metrology and Measurement Systems

LTCC Breakdown Voltage Investigation

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