Low Temperature Co-Fired Ceramics for Micro-Fluidics

Youngsman, John; Marx, Brian M.; Schimpf, Martin E.; Wolter, Scott D.; Glass, J. T.; Moll, Amy

doi:10.1109/ectc.2006.1645733

Cited by 3 publications

(3 citation statements)

References 7 publications

(8 reference statements)

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“…Co-fired ceramic tape technology, which has been used for the production of Multichip Modules since the 1980s, 9 has also been considered for microfluidics applications 10,11 for some time, and because of the higher temperature operation and material compatibilities with reactive fluids, it may become a good choice for fabricating micro-or meso-scale combustors. Low temperature co-fired ceramic (LTCC) material has a ceramic-glass-based composition and often consists of alumina, glass, and organic binder.…”

Section: Introductionmentioning

confidence: 99%

Development of Meso‐Scale Co‐Fired Ceramic Tape Axisymmetric Combustors

Sun

Cai

Donadio

et al. 2011

Int J Applied Ceramic Tech

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Meso-scale combustors for use in small chemical thrusters were fabricated from low temperature co-fired ceramic (LTCC) and high temperature co-fired ceramic (HTCC) tape technology, and operated with gaseous fuels and oxidizers. In contrast to previous research with tape technology where two-dimensional planar geometries have been fabricated, the present combustors were cylindrical axisymmetric. Igniters that consist of metal wires or silver pastes were co-fired with the ceramic bodies. Ignition and combustion phenomena were studied in combustors with different volumes and various fuels (H 2 , CH 4 , C 2 H 2 , and C 2 H 4 ) with either oxygen or air. Various injection methods of the reactants were investigated to determine ignition criteria and flame stability. Reliable and restartable ignition was obtained in combustion chambers ranging from 16 to 104 mm 3 . Sustained and stable combustion longer than 600 s was achieved with hydrogen and oxygen under a wide range of equivalence ratios ranging from 0.1 to 1.0. Chemical composition analyses from the combustor exhaust plume were performed with a 64-mm 3 combustion chamber. Combustion efficiencies were determined to be higher than 95% for fuel-lean conditions. However, the thermal efficiency of the 64 mm 3 combustor was estimated to be considerably lower at about 40%. *buaasw@163.com

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Section: Introductionmentioning

confidence: 99%

Development of Meso‐Scale Co‐Fired Ceramic Tape Axisymmetric Combustors

Sun

Cai

Donadio

et al. 2011

Int J Applied Ceramic Tech

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“…In addition, the developed model could be used in other ceramics based production involving burn-off processes. x [3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19] Model validations between kinetic parameters obtained from average mass loss and isoconversion variable kinetic parameters at isothermal step of 923 K for 30 min at constant heating rate at 10 K/min on HL2000…”

mentioning

confidence: 99%

“…They are normally removed after lamination but could be burnt off during the sintering process. In some instances, cleaning of structure (micro may be required after sintering especially for fluidic applications [11,14]. Removal of insert after lamination may pose difficulty.…”

mentioning

confidence: 99%

Development of fabrication process for embedded structure in multi-layer low temperature co-fired ceramics (LTCC) using sacrificial carbon by process modelling and simulation

Tan¹

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The evolution of Low Temperature Co-fired Ceramics (LTCC) allows the realisation of high speed electronic devices based on a ceramics multilayer platform. Its unique layered lamination and ease of 3D structuring also extend its applications beyond electronics to the areas of microsystems. To realise 3D structure in LTCC, the forming of embedded structures is inevitable. However, achieving good quality embedded structures with tight dimensional tolerance and free of defects remains a challenge. The most promising method for the fabrication of embedded structure is by employing sacrificial material to support the structure and to retain its dimensional accuracy from the lamination to the sintering processes. Carbon as the fugitive material is of particular interest as it gasifies directly from solid to gas phase under oxidizing environment and the reaction accelerates at high temperature. It is chemically simple and left no trace of residue if the burn-off is complete. However, the detailed process characterisation with respect to carbon burn-off, particularly under embedded condition, has not been established. It is important to understand the competing kinetics between carbon burn-off and LTCC densification such that the process parameters could be optimised for having defect free embedded structures and an efficient production cycle. Experimental kinetic analysis on the carbon tape using thermal analysis was conducted. Catalytic carbon burn-off was observed for carbon embedded with LTCC. Solidcatalysed effect is significant and varies with different LTCC systems. For a valid burn-off evaluation when the fugitive carbon is used for embedded structure viii

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