Low-Temperature Bonding of Nanolayered InGaP/SiO₂ Waveguides for Spontaneous-Parametric Down Conversion

Abstract

The integration of III–V materials on photonic integrated circuits has enjoyed a lot of attention because of the necessity of merging photon sources with silicon electronics. Nevertheless, III–V source integration technologies are not sufficiently mature, inhibiting the employment of such platforms to a broader range of applications. Here, we present a novel approach that enables the transfer of III–V nanolayers (≈250 nm) to silicates via oxide bonding. Through use of a thick photoresist scaffold (≈30 μm), complete removal of the substrate can be performed while preserving the relative structure morphology. The use of the III–V native oxide without depositing interfacial oxide layers greatly reduces the processing time and cost. The transfer of an array composed of 1 mm long InGaP waveguides with 250 nm thickness and widths spanning from 0.7 to 11.2 μm to a SiO2 substrate has been experimentally demonstrated, evidencing the feasibility of the technique for wafer-scale processing. The application of the nanolayered waveguides in the spontaneous-parametric down-conversion process has been tested by photon-correlation measurement, showing good agreement with the theoretical model.

Tunable spontaneous-parametric down-conversion in III-V semiconductor waveguides heterogeneously integrated in the silicon platform

“…4 Here, we present further advancements on a III-V heterogeneous integration technique, allowing the transfer of tens of nm thick III-V layers onto silicates via molecular bonding between the III-V's native oxide and SiO 2 at low temperature. 5 The transferred waveguides (WGs) have been tested in SPDC process. The counter-propagating photon pairs are generated from an out of plane pump beam focused along the WG with parallel polarization to the WG, as shown in Fig.…”

Blue‐green emission of pepsin‐stabilized copper nanoclusters ultrafast detection of hemoglobin in human urine

“…[1] In contrast, metal nanoparticles have the characteristics of surface Plasmon resonance, which makes them exhibit a strong absorption band in the visible-near-infrared (NIR) (400-1,100 nm) wavelength region. [2] As the core size of metal particles approaches the Fermi wavelength of electrons, their continuous energy band is converted to the discontinuous one. [3,4] These unique metal particles with molecule-like behaviors are called metal nanoclusters (MNCs).…”