Low-temperature and low-cost excimer laser doping for poly-Si thin-film transistor fabrication

Imokawa, Kaname; Tanaka, Nozomu; Suwa, Akira; Nakamura, Daisuke; Sadoh, Taizoh; Goto, Tetsuya; Ikenoue, Hiroshi

doi:10.1117/12.2509141

Cited by 1 publication

(2 citation statements)

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“…Thus, these results show that phosphorus and aluminum were incorporated into the Si film by laser irradiation. As previously reported, we actually observed the reflectance and melting condition of Si during irradiation by employing in-situ monitoring based on a 633 nm CW laser [11]. It is thought that laser doping is a phenomenon derived from the melting of Si, and complete melt of Si was seen at the fluence of 400 mJ/cm 2 .…”

Section: Resultssupporting

confidence: 67%

“…In our previous study, phosphorus was doped onto Si films immersed in H 3 PO 4 solution by laser doping, and a phosphorus concentration of over 10 19 cm −3 was confirmed [10]. Moreover, a H 3 PO 4 solution coating process was established to prevent the generation of bubbles, which led to optical scattering during irradiation [11]. In particular, formation of low-resistance in-source/drain contacts is required in TFTs for good electrical properties.…”

Section: Introductionmentioning

confidence: 97%

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Fabrication of CMOS Invertors in Si Thin-Film-Transistors by Laser Doping Using a Chemical Solution Coating

Imokawa

Kurashige

Suwa

et al. 2020

IEEE J. Electron Devices Soc.

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We demonstrated that p-and n-type activation layers can be formed in Si films by laser doping with H 3 PO 4 solution and Al 2 O 3 sol coating. The phosphorus and aluminum concentrations at the laser doped region were found to be over 10 19 cm −3 in Si films. In addition, generations of the activation carriers for n-and p-type layers were confirmed by Hall effects measurement. In this study, the characteristic of CMOS invertors fabricated by laser doping are presented.INDEX TERMS Low temperature poly Si (LTPS), thin-film-transistor (TFT), excimer laser annealing (ELA), laser doping, chemical solution coating.

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Section: Resultssupporting

confidence: 67%

Section: Introductionmentioning

confidence: 97%