Low surface energy films for microgripping applications

Balabanava, N.; Wierzbicki, R.; Heerlein, H.; Zielecka, Maria; Rymuza, Z.

doi:10.1016/j.mee.2006.01.061

Cited by 4 publications

(6 citation statements)

References 3 publications

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“…Deposition of layer was carried out in two methods. Single‐layer coatings were the first method, which their effect on reduction of surface adhesion force has been proven in this paper and previous researches . The second method is a double‐layer deposition that is a new method to reduce the surface adhesion force, and the purpose of this method is to change the surface roughness and decrease of adhesion force; this is effective on increasing the efficiency of microassemblies and other equipments of MEMS.…”

Section: Discussionmentioning

confidence: 69%

“…In recent years, the increasing use of microelectromechanical system (MEMS) devices and new fields like microassembly has resulted in decrease of adhesion force in the devices employed for capturing, safe holding, transferring, and releasing microparts such as microgrippers . The effective force on the adhesion of surface in the MEMS are Van der Waals force as well as capillary and electrostatic force, prevailing the weight of the parts …”

Section: Introductionmentioning

confidence: 99%

“…Other researches have studied the effect of surface roughness and the particles size on the adhesion . In addition, the effect of decreasing the pull‐off force on the roughness of surface of microgrippers has been investigated by the fabrication of the polymeric coating deposited …”

Section: Introductionmentioning

confidence: 99%

“…According to the studies conducted on the deposition of polymeric films, the method of Deeping is implemented; for the nonpolymeric films, a method like atomic layer deposition (ALD) is applied. The high potential and velocity of the coating, the precise control of the thickness of the film, and the high quality of this thin layer are the advantages of the ALD coating.…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Experimental investigation of the adhesion force of single and double‐layer coatings on MEMS surfaces

Joulaei

Kolahdoozan

Salehi

et al. 2018

Surface & Interface Analysis

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Adhesion force is one of the most important factors in microelectromechanical systems (MEMS), especially for microassembly. It depends on operating conditions and is affected by the contact area. In this study, the adhesion force between MEMS materials and AFM tips was analysed using AFM's point-mode spectroscopy. The aim was to study the effectiveness of various coatings in MEMS adhesion surfaces.For this purpose, five silicon surfaces were used, four of which were coated, and one was noncoated. Two of them were deposited by single-layer coating (Au and Ag). The other two were deposited by double-layer coating (TiO 2 /Au, TiO 2 /Ag) on a Si (1 0 0) substrate. The depositing was accomplished by the thermal evaporation method. Composite materials and analysis were reviewed by observing the SEM image. The experimental results showed that the method of deposition helped to decrease the adhesion force between the probe tip and the surface of the specimens, and double-layer coating had stronger effect on decreasing the adhesion force than the single-layer coating.

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Section: Discussionmentioning

confidence: 69%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Experimental investigation of the adhesion force of single and double‐layer coatings on MEMS surfaces

Joulaei

Kolahdoozan

Salehi

et al. 2018

Surface & Interface Analysis

View full text Add to dashboard Cite

show abstract

“…One of the main challenges in this regard is the attachment of micron parts to the jaws of the micron gripper. When the gripper is close to the piece, the absorbing forces may cause the piece to jump towards it, so the gripper cannot be oriented and handled correctly [4].…”

Section: Introductionmentioning

confidence: 99%

Experimental study of the effect of target composition and heat treatment on the Ag deposit on the adhesion of the surfaces used in microelectromechanical systems (MEMS)

Soleimani,

Kolahdoozan,

Salehi

et al. 2024

Phys. Scr.

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Adhesion force is one of the major factors in MEMS technology specifically during micro assembling via micro grippers. Regarding the light weight of MEMS devices, the contact force between MEMS devices and the microgripper surface causes distinct problems such as sticking the MEMS surface to the microgripper, so the assemble procedure can be affected and microparts not be placed in the right position. so decreasing adhesion force has a significant role in improving micron assembly. Accordingly, in the current research work, the effects of various coating materials, deposition, and annealing temperatures on the surface roughness of microgripper substrate and its morphology are experimentally investigated considering the DC sputtering magnetron method to decrease adhesion force between microgripper substrate and MEMS device. For this purpose, seventeen silicon surfaces were used of which sixteen of them coated and one is non-coated. Deposited substrates can be classified into four groups four of them are deposited with double layers using two kinds of coating materials including Ti/Ag, SiO2/Ag, Ti/Ag-Pd-Cu, and SiO2/Ag-Pd-Cu respectively. After sample deposition, the AFM method was used to measure, the topographic images, the surface roughness, and the adhesion force. Regarding the differences in layers and distinct temperatures, the height and shape of hillocks directly depend on deposition and preheating temperature ranges. So as the deposition and preheating temperature increase, more hillocks grow and the adhesion force is more consequently.

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Adhesion study between micron-scale graphite particles and rough walls using the finite element method

Sun

Peng

Xiao

et al. 2021

Advanced Powder Technology

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Low surface energy films for microgripping applications

Cited by 4 publications

References 3 publications

Experimental investigation of the adhesion force of single and double‐layer coatings on MEMS surfaces

Experimental investigation of the adhesion force of single and double‐layer coatings on MEMS surfaces

Experimental study of the effect of target composition and heat treatment on the Ag deposit on the adhesion of the surfaces used in microelectromechanical systems (MEMS)

Adhesion study between micron-scale graphite particles and rough walls using the finite element method

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