2023
DOI: 10.1088/2053-1583/acc1f4
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Low resistance electrical contacts to few-layered MoS2 by local pressurization

Abstract: The performance of electronic and optoelectronic devices is dominated by charge carrier injection through metal–semiconductor contacts. Therefore, creating low-resistance electrical contacts is one of the most critical challenges to the development of devices based on new materials, especially in the case of two-dimensional semiconductors. Here, we report a strategy to reduce contact resistance to MoS2 via local pressurization. We make electrical contacts using an Atomic Force Microscopy tip and apply variable… Show more

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Cited by 6 publications
(2 citation statements)
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“…Usually, high Schottky barriers at the metal-semiconductor interfaces can seriously limit the improvement of monolayer 2D semiconductor FETs. A series of strategies have been reported to reduce the height of the Schottky barrier to obtain high-performance monolayer 2D semiconductor FETs, [51][52][53] whereas the reduction of contact resistance or Schottky barrier height would reduce the potential well for optoelectronic memory. This study showed that the defects at the metal-semiconductor interface caused by heavy ion irradiation were an effective way to improve the contact resistance and reduce the Schottky barrier.…”
Section: Resultsmentioning
confidence: 99%
“…Usually, high Schottky barriers at the metal-semiconductor interfaces can seriously limit the improvement of monolayer 2D semiconductor FETs. A series of strategies have been reported to reduce the height of the Schottky barrier to obtain high-performance monolayer 2D semiconductor FETs, [51][52][53] whereas the reduction of contact resistance or Schottky barrier height would reduce the potential well for optoelectronic memory. This study showed that the defects at the metal-semiconductor interface caused by heavy ion irradiation were an effective way to improve the contact resistance and reduce the Schottky barrier.…”
Section: Resultsmentioning
confidence: 99%
“…This ensures a good electrical contact between the probes and the MoS 2 . [ 54 ] The experimental set up includes a Keithley 2400 source meter to apply the bias voltage between electrodes, a Femto DLPCA‐200 variable‐gain low‐noise current preamplifier, and a Keithley 2000 multimeter to measure the output of the preamplifier.…”
Section: Methodsmentioning
confidence: 99%