2004
DOI: 10.1063/1.1652238
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Low resistance and transparent Ni–La solid solution/Au ohmic contacts to p-type GaN

Abstract: We report on the formation of reliable Ni–La solid solution (8 nm)/Au (8 nm) ohmic contacts to p-type GaN (Na=5×1017 cm−3). The as-deposited contact reveals nonlinear current–voltage (I–V) characteristics. However, the contacts show considerably improved I–V behavior when annealed at temperatures of 350–550 °C for 1 min in air ambient. For example, the specific contact resistance as low as 7.2×10−5 Ω cm2 is obtained from the samples annealed at 550 °C, whose transmittance is measured to be 82.5% at a wavelengt… Show more

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Cited by 13 publications
(5 citation statements)
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“…Song et al also obtained a transparency of 74% at 470 nm with their Zn‐Ni ss/Au contact, a transparency of 82.5% at 470 nm with the Ni‐La ss/Au contact, and 79% at 460 nm with the Ni‐Mg ss/Au contact …”
Section: High Transparency Materialsmentioning
confidence: 94%
See 1 more Smart Citation
“…Song et al also obtained a transparency of 74% at 470 nm with their Zn‐Ni ss/Au contact, a transparency of 82.5% at 470 nm with the Ni‐La ss/Au contact, and 79% at 460 nm with the Ni‐Mg ss/Au contact …”
Section: High Transparency Materialsmentioning
confidence: 94%
“…Metals which readily absorb H were also used for p‐GaN contact metal schemes, such as La in a Ni‐La ss contact by Song et al and Cr in Cr/Au contacts in the work of Kalaitzakis et al…”
Section: Metal Contactsmentioning
confidence: 99%
“…A specific contact resistance of around approximately 10 À2 -10 À6 cm 2 can be achieved in the Ni/Au, 1,2) Ni/Pt/Au, 3) Ni/Pd/Au, 4) Ni/ AuBe, 5) Ni/ZnO, 6) and Ni-Mg (La or Zn) solid solution/Au series. [7][8][9] Many studies concerning Ni have been carried out. Thus, it is important to understand the interfacial reactions between Ni and GaN.…”
mentioning
confidence: 99%
“…The surface morphology can become very rough, especially in the case of the common Ni/Au contact, and the contact can fail to display Ohmic properties. A number of approaches to compensate for this problem have been explored, including the use of non-alloyed Rh-based contacts [22] and Pd [23], W [29], as well as families of borides [30,31] and nitrides [32].…”
Section: Introductionmentioning
confidence: 99%