2004
DOI: 10.1364/opex.12.001090
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Low propagation loss of 0.76 dB/mm in GaAs-based single-line-defect two-dimensional photonic crystal slab waveguides up to 1 cm in length

Abstract: Straight single-line-defect photonic crystal (PC) waveguides on GaAs slabs with lengths of 1, 4, and 10 mm have been fabricated. By controlling the Al content of a sacrificial AlGaAs clad layer and the wet etching duration, a PC core layer with a very smooth surface was obtained. Atomic force microscope images indicate that the roughness on the top surface is less than 1 nm. An extremely low propagation loss of 0.76 dB/mm for the GaAs-based PC waveguide was achieved.

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Cited by 145 publications
(57 citation statements)
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“…However, by removing the oxide cladding in SOI, and thus creating a membrane, the light line of the cladding is shifted to higher frequencies. In this way, a W1 waveguide with sufficient bandwidth is possible, and waveguides with very low propagation losses (less than 1 dB/mm) have been demonstrated both in silicon membranes [10], [11] and in GaAs membranes [12].…”
Section: Photonic Crystalsmentioning
confidence: 99%
“…However, by removing the oxide cladding in SOI, and thus creating a membrane, the light line of the cladding is shifted to higher frequencies. In this way, a W1 waveguide with sufficient bandwidth is possible, and waveguides with very low propagation losses (less than 1 dB/mm) have been demonstrated both in silicon membranes [10], [11] and in GaAs membranes [12].…”
Section: Photonic Crystalsmentioning
confidence: 99%
“…Thereby, the overall size of optical components based on PhCW structures may be greatly minimised and, correspondingly, device packing density increased. Recent advances in deep UV lithography at 248 nm [5] have made mass fabrication of optical ultra-compact PhCW devices viable by employing existing fabrication methods commonly encountered in the semiconductor electronics industry.Research has now reached a level where existing fabrication technologies allow manufacture of PhCW structures with low propagation losses [6][7][8][9]. Hence, there is presently worldwide focus on the design and fabrication of PhCW structures possessing adequate bandwidths.…”
mentioning
confidence: 99%
“…Research has now reached a level where existing fabrication technologies allow manufacture of PhCW structures with low propagation losses [6][7][8][9]. Hence, there is presently worldwide focus on the design and fabrication of PhCW structures possessing adequate bandwidths.…”
mentioning
confidence: 99%
“…3. Scanning electron microscopy images of (a) InP-based substrate-like and (b) GaAsbased membrane-like planar photonic crystals [(a) Ferrini et al, 2002a; Sugimoto et al, 2004].…”
Section: Introductionmentioning
confidence: 99%