Low-pressure gas discharge modelling

Abstract

Low-pressure gas discharge modelling is reviewed, both from a historical perspective and for current industrial applications. An ovetview of the basic mathematical and physical models used to describe low-pressure discharges is given, together with a summary of the most common numerical techniques which have been adopted. Modelling of the oc glow discharge and discharges maintained by high-frequency (RF and microwave) electromagnetic fields is reviewed, with illustrations of the validity of these models in predicting discharge properties and explaining and interpreting experimental results.

Experimental study of a low-pressure glow discharge in air in large-diameter discharge tubes: I. conditions for the normal regime of a glow discharge

“…Therefore, it is not surprising that, in studying a glow discharge, much attention is frequently paid to the characteristics of the cathode sheath (see, e.g., [3,7,[24][25][26][27][28][29][30][31]). We also measured such important characteristics as the cathode voltage drop U c (i.e., the voltage drop across the cathode sheath) and the cathode-sheath length d c .…”

“…As is known [1][2][3][4][5][6][7], dc glow discharges can occur in both normal and abnormal regimes. In the abnormal regime, the entire cathode is occupied by the discharge.…”

Reaction Mechanism of Ethylene Oxide at Various Oxygen/Ethylene Oxide Ratios in an RF Cold Plasma Environment

“…Various types of plasma models have been proposed to provide an interpretation of diagnostic measurements and to understand the effects of operating parameters (Lister, 1992;Meyyappan and Govindan, 1995;Bose et al, 1999). Basic components for a complete plasma model should include: 1) an electric model describing discharge physics for charged species; 2) a plasma chemistry model, including fluid flow; and 3) a surface model, describing reactions at the substrate and chamber wall.…”

Simulation of Direct-Current Surface Plasma Discharges in Air for Supersonic Flow Control

“…In the LFA, electrons are assumed to be in equilibrium with the reduced electric field (E/N g ) owing to relatively high pressure conditions for these discharges. However, the LFA may be inaccurate due to non-local transport effects at relatively low pressures and in the cathode fall region of the discharge where the electric field is strong [44]. where…”