1987
DOI: 10.1039/ja9870200661
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Low-pressure discharges: fundamental and applicative aspects. A review

Abstract: of Contents 1 Introduction 1 .I. Historical 1.2. General Description and Properties 2 Principles of Operation 2.1. Glow Discharge with a Planar Cathode 2.2. Hollow-cathode Discharge 3 Instrumentation 3.1. Basic Versions of Planar Cathode Glow Discharge lubes 3.2. Basic Versions of Hollow-cathode Tubes 4 Analytical Performance 4.1. Procedures for Sample Introduction 4.2. Selected Applications 4.2.1. Recent uses of planar-cathode glow discharges 4.2.1 .I. Analysis of metals and alloys 4.2.1.2. Analysis of refrac… Show more

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Cited by 49 publications
(3 citation statements)
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“…The observed behavior may be explained in terms of a radial distribution of the electron number density within the hollow cathode tube. It has been reported in the literatures 15,16 that the electron number density varies with the pressure increase, as shown in Fig. 6.…”
Section: Optimization Of Experimental Parametersmentioning
confidence: 85%
“…The observed behavior may be explained in terms of a radial distribution of the electron number density within the hollow cathode tube. It has been reported in the literatures 15,16 that the electron number density varies with the pressure increase, as shown in Fig. 6.…”
Section: Optimization Of Experimental Parametersmentioning
confidence: 85%
“…Auxiliary excitation of the negative glow by secondary dc, RF, and microwave discharges has also been attempted in both the HCD [61] and GGD [64]. Al thou gh enhanced exci tation of sputtered atoms is evident, the auxiliary discharge interferes with the sputteri ng ability of the primary discharge.…”
Section: B Applicationsmentioning
confidence: 99%
“…Both sources [61], [62] have had ma gnets incorporated into their desi gns in an attempt to increase both these parameters. The applied magnetic field forces the free electrons in the discharge to follow a helical motion about the electrical lines of force that increases their displacement through the negative glow, mak ing an exci ting or ionizing colli sion more probable.…”
Section: B Applicationsmentioning
confidence: 99%