Abstract:This dissertation demonstrates a low power strain sensor based on the tunneling current in a metal-oxide-semiconductor (MOS) structure with a power consumption of a couple of nano-Watts (nW) with a minimum detectable strain of 0.00036%. Both DC and AC measurements were used to characterize the MOS tunneling current strain sensor. The noise level is found to be smallest in the inversion region, and therefore it is best to bias the device in the inversion region.To study the sensitivity in the inversion region, … Show more
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