Low power consumption micro C2H5OH gas sensor based on micro-heater and screen printing technique

Optimization of power consumption for gas sensor nodes: A survey

“…The second approach, based on membrane technology [26], provides for the reduction of the heater and catalyst areas. It helps optimizing the power consumption, but results in degraded sensor response.…”

Low power consumption micro C2H5OH gas sensor based on micro-heater and ink jetting technique

“…The low power consumption micro-heater was fabricated through a CMOS compatible MEMS processes, which was designed to endure high stress and to be suitable for ink jetting deposition [25]. By the way, there are some differences in the design and process, for example, the shape of the etching holes was circular and the etching hole in the center of the micro-heater was added for short <Fig.…”

Temperature Compensation Methods of Nondispersive Infrared CO2 Gas Sensor with Dual Ellipsoidal Optical Waveguide

“…(1,2) The three types of gas sensors that have been commonly used in domestic, industrial, and automotive areas are semiconductor-, catalytic-, and electrochemical cell-based units. (3)(4)(5) Because the principles of the abovementioned sensors are mainly based on the chemical reactions between the target gas and the surface of the sensor, they are heated to activate the surfaces of the sensors to improve the sensitivity of the sensor itself. However, devices working on this principle show poor selectivity amongst other ambient gases (mainly water vapor, hydrocarbons, and carbon monoxide) because the surfaces are exposed directly to the ambient environment, (6,7) whereas nondispersive infrared (NDIR) sensors are considered to be specific to those species alone.…”