Low Power 0.13um Single Poly Embedded P-channel SONOS Flash using Band-to-Band Programming

Abstract

An embedded single poly P-channel flash with the Band-to-Band tunneling induced Hot Electron(BBHE) programming, has advantages of fast programming and low power is demonstrated in this paper. With only 3 additional non-critical masks, the SONOS base technology is embedded into 0.13um logic technology successfully. The BBHE injection scheme has been utilized to achieve fast programming, low power consumption and page program.