Low-loss photonic crystal defect waveguides in InP

Kotlyar, M. V.; Karle, Timothy J.; Settle, Michael; О’Faolain, L.; Krauss, Thomas F.

doi:10.1063/1.1737487

Cited by 49 publications

(20 citation statements)

References 13 publications

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“…10,11 Also in this chemically assisted ion-beam-etching ͑CAIBE͒ technique, the etch depths strongly depend on hole diameter for diameters well below 1 m, as was shown in a recent systematic investigation. 12 Successful etching of deep photonic-crystal holes has also been accomplished by high-plasma-density RIE using ECR ͑Ref.…”

mentioning

confidence: 66%

Comparative study of Cl2, Cl2∕O2, and Cl2∕N2 inductively coupled plasma processes for etching of high-aspect-ratio photonic-crystal holes in InP

Carlström

Andriesse

Karouta

et al. 2008

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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An extensive investigation has been performed on inductively coupled plasma etching of InP. An important motivation for this work is the fabrication of high-aspect-ratio holes for photonic crystals. The essential chemistry is based on Cl 2 with the addition of N 2 or O 2 for sidewall passivation. The influence of different process parameters such as gas flows, temperature, pressure, ion energy, and inductively coupled plasma power on the hole geometry is presented. It is concluded that photonic crystals can be etched with Cl 2 only; however, temperature and pressure control is critical. Adding passivation gases largely broadens the window in the parameter space for hole etching. Most importantly, etching of narrow holes can be carried out at higher temperatures where the etching is mass limited and spontaneous etching of InP by Cl 2 occurs.

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mentioning

confidence: 66%

Comparative study of Cl2, Cl2∕O2, and Cl2∕N2 inductively coupled plasma processes for etching of high-aspect-ratio photonic-crystal holes in InP

Carlström

Andriesse

Karouta

et al. 2008

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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“…[5][6][7] Here we present an alternative approach to fabricating useful photonic crystals based on the extrusion self-assembly of low-contrast flexible photonic nanomaterials. Tuning of the band gaps with angle and strain is clearly observed in these films.…”

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confidence: 99%

Compact strain-sensitive flexible photonic crystals for sensors

Pursiainen

Baumberg

Ryan

et al. 2005

Applied Physics Letters

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A promising fabrication route to produce absorbing flexible photonic crystals is presented, which exploits self-assembly during the shear processing of multi-shelled polymer spheres. When absorbing material is incorporated in the interstitial space surrounding high-refractive-index spheres, a dramatic enhancement in the transmission edge on the short-wavelength side of the band gap is observed. This effect originates from the shifting optical field spatial distribution as the incident wavelength is tuned around the band gap, and results in a contrast up to 100 times better than similar but nonabsorbing photonic crystals. An order-of-magnitude improvement in strain sensitivity is shown, suggesting the use of these thin films in photonic sensors. © 2005 American Institute of Physics. ͓DOI: 10.1063/1.2032590͔ Synthesis of three-dimensional ͑3D͒ photonic crystals based on synthetic opals has been well developed over the past decade, 1-3 with a particular focus on in-filling with highrefractive-index media to create true 3D band gaps.1,4 However, the application of 3D photonic crystals has been restricted compared to the advanced technology built on twodimensional photonic crystals fabricated from patterned planar waveguides.5-7 Here we present an alternative approach to fabricating useful photonic crystals based on the extrusion self-assembly of low-contrast flexible photonic nanomaterials. Tuning of the band gaps with angle and strain is clearly observed in these films. However, as is typical in polymer-based photonic crystals, the dielectric nanostructures exhibit a low on/off contrast at the edges of the Bragg scattering peaks making their incorporation into sensors problematic. We show that by introducing an absorbing material into the surroundings of the polymer spheres ͑which is very easy to achieve in this process͒, the transmission contrast can be increased by a factor of Ͼ100, leading to prospective applications in compact vibration and thermal sensors. We analyze this behavior in terms of the optical field distribution on either side of the band gap, and show that absorbing 3D photonic crystals inherently improve on the performance of absorbing one-dimensional ͑1D͒ photonic crystals ͑Bragg mirrors͒.Our sample precursors consist of hard polystyrene ͑PS͒ cores, covered by a poly͑methylmethacrylate͒ ͑PMMA͒ interlayer, and a polyethylacrylate ͑PEA͒ shell. Self-assembly processes occur during the shearing by uniaxial compression of the precursor melt resulting in fcc crystallization of the PS-PMMA cores, with the soft PEA shell material filling the spaces between the PS-PMMA lattice sites thus forming an elastic film. Hence the ͑111͒ plane of the fcc lattice is parallel to the sample surface. A detailed description of the precursors and the manufacturing is reported elsewhere. 8 The final samples used here are disks with a diameter of 10 cm and a thickness of around 250 m ͓Fig. 1͑a͔͒.Angle-dependent reflection measurements were carried out to identify the final lattice pitch and average refractive index. Monoch...

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“…This corresponds to the state-of-the-art for reactive ion etching (RIE) technology 3 . Better results, around 20dB/cm, were obtained using chemically assisted ion-beam etching (CAIBE) 2 .…”

Section: W3 Waveguide Lossesmentioning

confidence: 99%

The impact of metallic contacts on propagation losses of an underlying photonic crystal waveguide

et al. 2008

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Please check the document version of this publication:• A submitted manuscript is the version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publicationGeneral rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.• You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal.If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the "Taverne" license above, please follow below link for the End User Agreement: www.tue.nl/taverne Take down policyIf you believe that this document breaches copyright please contact us at:openaccess@tue.nl providing details and we will investigate your claim. ABSTRACTIn view of an electrically pumped photonic crystal-based semiconductor optical amplifier (SOA), we investigate optical mode propagation in 2D PhC waveguides in the presence of metal contacts for carrier injection. Our photonic crystal (PhC) devices are manufactured in the InP/InGaAsP material system. For the loss measurements, we have fabricated contact strips as narrow as 300nm with a sub-50nm placing accuracy on top of W3 waveguides. We study the influence of their position and width on optical power transmission through passive waveguides with respect to viability for future active devices. Our experimental results are complemented by numerical studies (FDTD, plane-wave expansion method).

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Low-loss photonic crystal defect waveguides in InP

Cited by 49 publications

References 13 publications

Comparative study of Cl2, Cl2∕O2, and Cl2∕N2 inductively coupled plasma processes for etching of high-aspect-ratio photonic-crystal holes in InP

Comparative study of Cl2, Cl2∕O2, and Cl2∕N2 inductively coupled plasma processes for etching of high-aspect-ratio photonic-crystal holes in InP

Compact strain-sensitive flexible photonic crystals for sensors

The impact of metallic contacts on propagation losses of an underlying photonic crystal waveguide

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