Low-loss micromachined filters for millimeter-wave communication systems

Blondy, Pierre; Brown, Andrew R.; Cros, Dominique; Rebeiz, Gabriel M.

doi:10.1109/22.739212

Cited by 127 publications

(61 citation statements)

References 12 publications

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“…Examples include etching away parts of the lossy substrate close to the line [15]- [17]; creating hollow waveguides by bonding substrates with etched grooves [18], [19]; suspending elements of the transmission line above the lossy substrate by etching away sacrificial layers below them [20]- [23]; and using 3-D polymer or metal-printing techniques to achieve air-filled transmission lines [24]- [26] or coaxial waveguides filled with low-loss polymers [27]. Reduction of ohmic losses by increasing the metal thickness of coplanar waveguides has been shown using synchrotron radiation lithography [28].…”

mentioning

confidence: 99%

Static Zero-Power-Consumption Coplanar Waveguide Embedded DC-to-RF Metal-Contact MEMS Switches in Two-Port and Three-Port Configuration

Sterner

Roxhed

Stemme

et al. 2010

IEEE Trans. Electron Devices

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Abstract-This paper reports on novel electrostatically actuated dc-to-RF metal-contact microelectromechanical systems (MEMS) switches, featuring a minimum transmission line discontinuity since the whole switch mechanism is completely embedded inside the signal line of a low-loss 3-D micromachined coplanar waveguide. Furthermore, the switches are based on a multistable interlocking mechanism resulting in static zero-power consumption, i.e., both the onstate and the offstate are maintained without applying external actuation energy. Additionally, the switches provide with active opening capability, potentially improving the switch reliability, and enabling the usage of soft low-resistivity contact materials.

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mentioning

confidence: 99%

Static Zero-Power-Consumption Coplanar Waveguide Embedded DC-to-RF Metal-Contact MEMS Switches in Two-Port and Three-Port Configuration

Sterner

Roxhed

Stemme

et al. 2010

IEEE Trans. Electron Devices

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“…At millimetre-wave frequencies the use of low loss and low dispersion micromachined devices has mainly been targeted on the investigation of suspended microstrip lines [1][2][3]. The thin centre conductor of the microstrip is usually suspended by thin membranes.…”

Section: Introductionmentioning

confidence: 99%

“…The thin centre conductor of the microstrip is usually suspended by thin membranes. The layered coaxial structure proposed here is more compact and has outstanding low loss characteristics [4], compared with [1][2][3]. One of the few structures that exhibits lower loss is the rectangular waveguide.…”

Section: Introductionmentioning

confidence: 99%

Air-filled square coaxial transmission line and its use in microwave filters

Llamas-Garro

Lancaster

Hall

2005

IEE Proc., Microw. Antennas Propag.

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A suspended coaxial transmission line with an air propagation medium is presented. The transmission line is made only of metal, thereby avoiding dielectric and radiation losses. Shortcircuit stubs suspend the centre conductor of the coaxial structure which is used in the design of two dual-mode narrowband microwave filters. Stacked layers of copper sheets are used to form the square coaxial transmission line, which has low loss and low dispersion.

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“…In this paper, a coaxial structure based Ka band dual mode filter is proposed. Compared with the structures mentioned in [4,5,7], the proposed transmission line structure is more compact and has an air propagation medium providing low loss. An SU-8 UV-lithographical process is discussed in this paper for the fabrication of the filter.…”

Section: Introductionmentioning

confidence: 99%

“…For this reason, MEMS filters have gained attention from researchers [1][2][3]. As the main material for MEMS devices, silicon has been used in constructing thin layer filters as proposed in [4,5]. In recent years, the materials used in MEMS fabrication have expanded from silicon to various non-silicon materials, among which SU-8 photoresist is an obvious one [6].…”

Section: Introductionmentioning

confidence: 99%

SU-8 Ka-band filter and its microfabrication

Jiang

Lancaster

Llamas-Garro

et al. 2005

J. Micromech. Microeng.

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This paper presents the design and microfabrication of a coaxial dual model filter for applications in LMDS systems. The coaxial structure is formed by five conductive layers, each of which is of 700 µm thickness. The filter uses an air filled coaxial transmission line. It is compact with low dispersion and low loss. The design has been extensively tested using a prototype filter micromachined using laser drilling on a copper sheet and the results show a good agreement with the theoretical calculations. The laser fabrication has exposed weakness in suitability to volume production, uneven edges and oxide residuals on the edges, which affects the filter performance. A process for fabrication of such a filter in SU-8 has been developed which is based on a UV lithographical process. In order to fabricate such thick SU-8 layers, the SU-8 process has been optimized in terms of UV radiation and post exposure baking. During the test fabrication, the optimized SU-8 process has produced microstructures with an aspect ratio of 40:1 and a sidewall of 90 ± 0.1 • . The high quality SU-8 structures can be then either coated with a conductive metal or used as moulds for producing copper structures using an electroforming process. The microfabrication process presented in this paper suits the proposed filter well. It also reveals a good potential for volume production of high quality RF devices.

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Low-loss micromachined filters for millimeter-wave communication systems

Cited by 127 publications

References 12 publications

Static Zero-Power-Consumption Coplanar Waveguide Embedded DC-to-RF Metal-Contact MEMS Switches in Two-Port and Three-Port Configuration

Static Zero-Power-Consumption Coplanar Waveguide Embedded DC-to-RF Metal-Contact MEMS Switches in Two-Port and Three-Port Configuration

Air-filled square coaxial transmission line and its use in microwave filters

SU-8 Ka-band filter and its microfabrication

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