1991
DOI: 10.1109/3.81372
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Low-loss III-V semiconductor optical waveguides

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Cited by 144 publications
(43 citation statements)
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“…On the other hand, for bent plasmonic waveguides, all the modes are radiative as is the case for curved dielectric waveguides [31]. This significantly complicates the calculation since energy must now be allowed to escape from the computation window without being reflected back.…”
Section: Simulation Methodsmentioning
confidence: 99%
“…On the other hand, for bent plasmonic waveguides, all the modes are radiative as is the case for curved dielectric waveguides [31]. This significantly complicates the calculation since energy must now be allowed to escape from the computation window without being reflected back.…”
Section: Simulation Methodsmentioning
confidence: 99%
“…Waveguides are the optical equivalent of the copper wiring in electronic ICs. The performance parameters for waveguides are losses (including propagation losses, coupling losses and bending losses) [8], the number of guided modes that can be transported, and wavelength and polarization dependence. These parameters are determined by the properties (index contrast, absorption, quality) of the materials used, by the geometry of the waveguides, and the effects of processing on these.…”
Section: Passive Componentsmentioning
confidence: 99%
“…[1][2][3] Photolithography and anisotropic dry-etching fabrication processes 4,5 transfer photo mask lineedge roughness and may introduce additional roughness to the etched sidewalls used to define the lateral effective index contrast, ⌬n eff , required to confine an optical mode. Theoretical and experimental studies of scattering loss ␣ ͑Refs.…”
Section: Reduction Of Etched Algaas Sidewall Roughness By Oxygen-enhamentioning
confidence: 99%