2003
DOI: 10.1063/1.1631753
|View full text |Cite
|
Sign up to set email alerts
|

Low-loss as-grown germanosilicate layers for optical waveguides

Abstract: We report on systematic growth and characterization of low-loss germanosilicate layers for use in optical waveguide technology. The films were deposited by plasma-enhanced chemical vapor deposition technique using silane, germane, and nitrous oxide as precursor gases. Fourier transform infrared spectroscopy was used to monitor the compositional properties of the samples. It was found that addition of germane leads to decreasing of N–H- and O–H-related bonds. The propagation loss values of the planar waveguides… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1

Citation Types

0
8
0

Year Published

2004
2004
2024
2024

Publication Types

Select...
5
2
1

Relationship

0
8

Authors

Journals

citations
Cited by 12 publications
(10 citation statements)
references
References 16 publications
(19 reference statements)
0
8
0
Order By: Relevance
“…[1][2][3] Silica which has 9.1 eV bandgap energy is well established as a premier candidate in optical communications. Germanium is a desirable choice as a dopant for the development of high-density optical devices and UV-sensitive material systems with low losses.…”
mentioning
confidence: 99%
“…[1][2][3] Silica which has 9.1 eV bandgap energy is well established as a premier candidate in optical communications. Germanium is a desirable choice as a dopant for the development of high-density optical devices and UV-sensitive material systems with low losses.…”
mentioning
confidence: 99%
“…After optimizing the material composition and poling conditions, we report a record peak d33 coefficient of -1.6 pm/V in thermally poled germanosilicate films. These films are of interest primarily for two important reasons: (1) their propagation loss can be very low, [3] which makes them excellent waveguide materials with a refractive index close to that of silica, and (2) the addition of Ge to the silica matrix increases the third-order optical susceptibility J 3) of the glass, which should result in an increase in the induced nonlinear coefficient. These properties make poled germanosilicate films a promising candidate for future low-loss integrated electro-optic devices.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, we have reported the lowest propagation loss values for as-grown germanosilicate films without the need for thermal annealing. [3] In order to optimnize the poling process for this material, we grew seven individual germanosilicate films with different characteristics, as listed in Table 1. Based on our previous work, [3] the propagation losses of the as-grown waveguides were estimated to be less than 0.15 dB/cm at 1550 mn.…”
Section: Introductionmentioning
confidence: 99%
“…3 Different preparation methods have been attempted to produce high quality oxide glass thin films such as sol-gel, [8,9] plasma or laser enhanced CVD, [10,11] or sputtering. [12] However, the production of high quality HMO glass thin films is still a challenge.…”
Section: Introductionmentioning
confidence: 99%