Tribological issues between friction pair are fundamental problems for minimized devices because of their higher surface-to-volume ratio. Micro/nanotexturing is an e®ective technique to reduce actual contact area between contact pair at the nanoscale. Micro/nanotexture made a great impact on the frictional behavior of textured surfaces. This paper summarizes the recent advancements in the¯eld of frictional behavior of micro/nanotextured surfaces, which are based on solid surface contact in atmosphere environment, especially focusing on the factors in°uencing the frictional behavior: Surface property, texturing density, texturing height, texturing structure and size of contact pair (atomic force microscope (AFM) tip) and texturing structures. Summarizing the e®ects of these factors on the frictional behavior is helpful for the understanding and designing of the surfaces in sliding micro/nanoelectromechanical systems (MEMS/NEMS). Controlling and reducing the friction force in moving mechanical systems is very important for the performance and reliability of nanosystems, which contribute to a sustainable future.Surf. Rev. Lett. Downloaded from www.worldscientific.com by RUTGERS UNIVERSITY on 08/23/15. For personal use only.