Low frequency arc-based MEMS structures for vibration energy harvesting

Apo, Daniel J.; Sanghadasa, Mohan; Priya, Shashank

doi:10.1109/nems.2013.6559805

Cited by 9 publications

(4 citation statements)

References 2 publications

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“…This design, termed as arc-based cantilever (ABC), has achieved <100 Hz resonant operation both on the Si MEMS platform and with bulk piezo material as compared to traditional cantilevers. The arc-based cantilever is a continuous cantilever that can be divided into purely circular arc segments, thereby making it a low frequency structure with dominant bending characteristic in the first (or fundamental) frequency mode (Apo, Sanghadasa, and Priya 2013). Different configurations of micro ABCs were investigated through analytical modeling and validation experiments.…”

Section: Low Frequency Energy Harvesting Structuresmentioning

confidence: 99%

A Review on Piezoelectric Energy Harvesting: Materials, Methods, and Circuits

Priya

Song

Zhou

et al. 2017

Energy Harvesting and Systems

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331

144

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Piezoelectric microelectromechanical systems (PiezoMEMS) are attractive for developing next generation self-powered microsystems. PiezoMEMS promises to eliminate the costly assembly for microsensors/microsystems and provide various mechanisms for recharging the batteries, thereby, moving us closer towards batteryless wireless sensors systems and networks. In order to achieve practical implementation of this technology, a fully assembled energy harvester on the order of a quarter size dollar coin (diameter=24.26 mm, thickness=1.75 mm) should be able to generate about 100 μW continuous power from low frequency ambient vibrations (below 100 Hz). This paper reviews the state-of-the-art in microscale piezoelectric energy harvesting, summarizing key metrics such as power density and bandwidth of reported structures at low frequency input. This paper also describes the recent advancements in piezoelectric materials and resonator structures. Epitaxial growth and grain texturing of piezoelectric materials is being developed to achieve much higher energy conversion efficiency. For embedded medical systems, lead-free piezoelectric thin films are being developed and MEMS processes for these new classes of materials are being investigated. Non-linear resonating beams for wide bandwidth resonance are also reviewed as they would enable wide bandwidth and low frequency operation of energy harvesters. Particle/granule spray deposition techniques such as aerosol-deposition (AD) and granule spray in vacuum (GSV) are being matured to realize the meso-scale structures in a rapid manner. Another important element of an energy harvester is a power management circuit, which should maximize the net energy harvested. Towards this objective, it is essential for the power management circuit of a small-scale energy harvester to dissipate minimal power, and thus it requires special circuit design techniques and a simple maximum power point tracking scheme. Overall, the progress made by the research and industrial community has brought the energy harvesting technology closer to the practical applications in near future.

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Section: Low Frequency Energy Harvesting Structuresmentioning

confidence: 99%

A Review on Piezoelectric Energy Harvesting: Materials, Methods, and Circuits

Priya

Song

Zhou

et al. 2017

Energy Harvesting and Systems

Self Cite

331

144

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show abstract

“…The arc-based cantilever (ABC) concept was introduced by Apo et al (Apo, Sanghadasa, & Priya, 2013Apo, Zhou, et al, 2014) to obtain low natural frequencies in MEMS EH and increase the surface area available for energy harvesting. An arc-based cantilever is a continuous cantilever that can be divided into circular arc segments, thereby making it a low frequency structure with dominant bending characteristics in the first (or fundamental) frequency mode.…”

Section: Low Frequency and Wideband Magnetoelectric Energy Harvestermentioning

confidence: 99%

Magnetoelectric energy harvester

Zhou¹,

Apo²,

Sanghadasa³

et al. 2015

Composite Magnetoelectrics

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“…Alternatively, some of the recent designs studied in the literature offer viable options for more flexible designs that keep the natural frequencies small without relying on a heavy tip mass, as a mass can cause large localized strains ultimately resulting in fatigue and fracture, [11][12][13][14][15][16][17][18]. These include techniques such as using axial loading investigated by Leland et al [19] to tune the natural frequency of the harvester, using arc-based geometry for a simple cantilever investigated by Apo et al [20] to further reduce the natural frequency, and using meandering cantilever design to lower the natural frequency as investigated by Fernandes et al [17,18] and Berdy et al [14]. Cantilevered piezoelectric energy harvesters with variable cross sections were also investigated by Goldschmidtboeing et al [21] and Ben Ayed et al [22].…”

Section: Introductionmentioning

confidence: 99%

A novel 3D folded zigzag piezoelectric energy harvester; modeling and experiments

Bath

Salehian

2018

Smart Mater. Struct.

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Cantilever geometries have been widely used for vibration energy harvesting applications due to their simple geometries, frequency tune-ability, and obtainability of their closed form analytical solutions. Recent studies have focused on overcoming some of the drawbacks for this configuration, which include low power density and natural frequencies much higher than those available in the environment. Some investigate two-dimensional geometries, such as a zigzag shaped design, meandering and elephant design. The previously researched designs offer a higher flexibility that allows for much smaller fundamental natural frequencies and improved power densities. The presented work extends this idea by offering a three-dimensional (3D) design called ‘folded zigzag’ that provides much better flexibility than the aforementioned units, and aids significantly with natural frequency requirements despite a small footprint. Compared to a planar design the proposed 3D design of the same footprint offers a much lower resonating frequency with increased flexibility, and also results in improved strain node pattern by avoiding torsion in the fundamental modes of its operation. This significantly eases the fabrication as avoids the charge cancellations when mounting continuous electrodes. Power densities for the proposed design are presented and compared to the flex geometry, a planar symmetric design, and experimental validations are made for the folded unit. The results show that the new design can produce higher power density per layer compared to the planar symmetric zigzag (flex geometry). This comparison is made while keeping all the system parameters the same for both units such as the footprint, dimensions, and tip mass per layer. Additionally, the simulation results show that increasing the number of stories or the distance between the consecutive stories for this design can help significantly with the reduction in the number of strain nodes in the fundamental modes. This as well helps with the electrode geometry due to avoiding the charge cancellation. Finally, it is shown that the presence of the strain nodes can be avoided for smaller footprints compared to the planar symmetric zigzag before the torsional modes become dominant.

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Low frequency arc-based MEMS structures for vibration energy harvesting

Cited by 9 publications

References 2 publications

A Review on Piezoelectric Energy Harvesting: Materials, Methods, and Circuits

A Review on Piezoelectric Energy Harvesting: Materials, Methods, and Circuits

Magnetoelectric energy harvester

A novel 3D folded zigzag piezoelectric energy harvester; modeling and experiments

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