Low-energy electron-collision processes in molecular chlorine

Rescigno, T. N.

doi:10.1103/physreva.50.1382

Cited by 49 publications

(53 citation statements)

References 29 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Although the choice of cross-sections or rate coefficients has not changed, we have improved the low energy portions of some of the cross-sections by adding zeros at their threshold or appearance energies. Having been given only from 8.4 eV previously, a zero value at 4 eV was added to the cross-section for electron impact dissociation, reaction (R1), in accordance with the cross-section calculated by Rescigno [20]. A zero value was also added to the cross-section for polar dissociation, reaction (R6), at 11.9 eV, which is the threshold energy of the reaction.…”

Section: Particle Balancementioning

confidence: 99%

A global (volume averaged) model of a Cl₂/Ar discharge: I. Continuous power

Thorsteinsson¹,

Guðmundsson²

2010

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

A global (volume averaged) model is applied to a low pressure (1–100 mTorr) high density chlorine discharge diluted with argon. The model is found to be in fair agreement with measurements reported in the literature. Atomic chlorine is the dominating chlorine species at low pressures and low argon content, but with increasing pressure the discharge becomes less dissociated. As the argon content is increased the chlorine dissociation fraction increases and the decrease with pressure becomes less pronounced. The electronegativity was found to decrease proportionally to the argon dilution for a wide range of discharge conditions. The pressure dependence of the Cl+/n+ fraction was found to vary with argon content, from peaking at low pressures in a pure chlorine discharge to peaking at high pressures in an argon dominated discharge. The electron temperature increases with argon content at low and intermediate pressures but decreases at high pressures. Argon–chlorine reactions generally have only a small effect on the creation or destruction of chlorine particles, even at high argon content, except for the loss of Cl− which is rapidly neutralized by Ar+ ions in an argon dominated discharge. Surface losses are most important for positive ion loss at low pressures and become increasingly important when the chamber is made larger or argon is added to the discharge. Volume losses always dominate the loss of neutral Cl atoms at low pressures, but at moderate to high pressures as well when the chamber is either large or small. Argon dilution benefits the neutral surface losses in small chambers but the volume losses in large chambers.

show abstract

Section: Particle Balancementioning

confidence: 99%

A global (volume averaged) model of a Cl₂/Ar discharge: I. Continuous power

Thorsteinsson¹,

Guðmundsson²

2010

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

show abstract

“…An RMPS calculation may not be. How balanced a calculation must be to give physical results is not a simple problem, and the level of correlation between the N and + N 1 electron problems is a subtle problem (Rescigno 1994). …”

Section: Rmpsmentioning

confidence: 99%

R-matrix calculations of low-energy electron alkane collisions

Varambhia

Munro

Tennyson

2008

International Journal of Mass Spectrometry

View full text Add to dashboard Cite

R-matrix calculations are performed for electron collision with CH 4 at energies between 0.02 and 15 eV using a series of different ab initio models for both the target and the full scattering system. A target model similar to the standard multi-reference configuration interaction used in electronic structure calculations is found to give the best results. Results are presented for elastic scattering, with particular emphasis on the Ramsauer-Townsend miminum, and for rotational excitation, momentum transfer and electron impact dissociation. Extensive comparisons are made with previous studies.

show abstract

“…The momentum-transfer cross sections for electron-Cl 2 and electron-Cl collisions are proposed by Rescigno. [25][26][27] The cross section for electronAr collisions employed is based on the data given by Kosaki and Hayashi. 28) We used the scattering model of Surendra et al 29) Note that m depends on r since hv m i depends on the EEDF at r. The boundary condition at r ¼ 0 isẼ E ¼ 0.…”

Section: Electric and Magnetic Fieldsmentioning

confidence: 99%

“…The use of a single random number is sufficient to determine whether or not an electron collides and in the case of collision, which type occurs. 34) The scattering angle is determined using the model of Surendra et al 29) for electron-Ar and the models of Rescigno [25][26][27] for electron-Cl 2 and electron-Cl. The The time step Át for the calculation of electron motion and electron collision is set at f À1 =2560.…”

Section: Motion and Collision Of Electronsmentioning

confidence: 99%

Electron Energy Distributions in Inductively Coupled Plasma: Comparison of Chlorine Discharge with Argon Discharge

Yonemura

Nanbu

Sakai

2002

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

The characteristics of the electron energy distribution functions (EEDFs) in inductively-coupled discharges of chlorine and argon gases are studied numerically. The EEDFs in atomic gases such as Ar and Cl show the three-temperature distribution with depletion in the high-energy region and enhancement in the low-energy region. By contrast, the EEDF for Cl 2 shows the bi-Maxwellian distribution close to the Maxwellian one. The reason for this difference is explained by the difference of electronic inelastic collision cross sections between atomic and molecular gases. The EEDFs obtained in the present simulation agree with the earlier experimental results qualitatively.

show abstract

Low-energy electron-collision processes in molecular chlorine

Cited by 49 publications

References 29 publications

A global (volume averaged) model of a Cl₂/Ar discharge: I. Continuous power

A global (volume averaged) model of a Cl₂/Ar discharge: I. Continuous power

R-matrix calculations of low-energy electron alkane collisions

Electron Energy Distributions in Inductively Coupled Plasma: Comparison of Chlorine Discharge with Argon Discharge

Contact Info

Product

Resources

About

Low-energy electron-collision processes in molecular chlorine

Cited by 49 publications

References 29 publications

A global (volume averaged) model of a Cl2/Ar discharge: I. Continuous power

A global (volume averaged) model of a Cl2/Ar discharge: I. Continuous power

R-matrix calculations of low-energy electron alkane collisions

Electron Energy Distributions in Inductively Coupled Plasma: Comparison of Chlorine Discharge with Argon Discharge

Contact Info

Product

Resources

About

A global (volume averaged) model of a Cl₂/Ar discharge: I. Continuous power

A global (volume averaged) model of a Cl₂/Ar discharge: I. Continuous power