Abstract:Low energy electron beams with particle energies of typically I 0 to 20 keV are used for puming gas lasers. Extremely thin (300 nm) ceramic (SiNk) membranes are used as entrance foils for the electron beam. Laser gas pressure up to several atmospheres is possible using this technique if the dimension of one side of the foil is restricted to about 1 mm. Energy loss of the electrons in the foil is less than 1 0%. The short range of the low energy electrons in the laser medium leads to a high specific power depos… Show more
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