The recent development
of liquid cell (scanning) transmission electron
microscopy (LC-(S)TEM) has opened the unique possibility of studying
the chemical behavior of nanomaterials down to the nanoscale in a
liquid environment. Here, we show that the chemically induced etching
of three different types of silica-based silica nanoparticles can
be reliably studied at the single particle level using LC-(S)TEM with
a negligible effect of the electron beam, and we demonstrate this
method by successfully monitoring the formation of silica-based heterogeneous
yolk–shell nanostructures. By scrutinizing the influence of
electron beam irradiation, we show that the cumulative electron dose
on the imaging area plays a crucial role in the observed damage and
needs to be considered during experimental design. Monte-Carlo simulations
of the electron trajectories during LC-(S)TEM experiments allowed
us to relate the cumulative electron dose to the deposited energy
on the particles, which was found to significantly alter the silica
network under imaging conditions of nanoparticles. We used these optimized
LC-(S)TEM imaging conditions to systematically characterize the wet
etching of silica and metal(oxide)–silica core–shell
nanoparticles with cores of gold and iron oxide, which are representative
of many other core–silica–shell systems. The LC-(S)TEM
method reliably reproduced the etching patterns of Stöber,
water-in-oil reverse microemulsion (WORM), and amino acid-catalyzed
silica particles that were reported before in the literature. Furthermore,
we directly visualized the formation of yolk–shell structures
from the wet etching of Au@Stöber silica and Fe
3
O
4
@WORM silica core–shell nanospheres.