Low-Dissipation Silicon Tuning Fork Gyroscopes for Rate and Whole Angle Measurements

Trusov, Alexander A.; Prikhodko, Igor P.; Zotov, Sergei A.; Shkel, Andrei M.

doi:10.1109/jsen.2011.2160338

Cited by 75 publications

(55 citation statements)

References 9 publications

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“…In TFGs, which typically have resonance frequencies within the spectrum of environmental shock and vibration stimuli, this is typically done by using redundant proof masses that respond differentially to a Coriolis force but produce a common-mode displacement that can be rejected during linear accelerations 32 . However, the effectiveness of this approach depends on how well design symmetry is maintained 14 and on the level of modal cross-excitation generated by errors in the capacitive sidewalls 33 .…”

Section: Shock and Vibration Rejectionmentioning

confidence: 99%

Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices

Serrano¹,

Zaman²,

Rahafrooz³

et al. 2016

Microsyst Nanoeng

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This paper reports on a new type of high-frequency mode-matched gyroscope with significantly reduced dependencies on environmental stimuli such as temperature, vibration, and shock. A novel stress-isolation system is used to effectively decouple an axis-symmetric bulk-acoustic wave (BAW) vibratory gyro from its substrate, minimizing the effect that external sources of error have on the offset and scale factor of the device. Substrate-decoupled (SD) BAW gyros with a resonance frequency of 4.3 MHz and Q values near 60 000 were implemented using the high aspect ratio poly and single-crystal silicon (HARPSS) process to achieve ultra-narrow capacitive gaps. Wafer-level packaged sensors were interfaced with a customized application-specific integrated circuit (ASIC) to achieve low variations in the offset across temperature (±26°s − 1 from − 40 to 85°C), supreme random-vibration immunity (0.012°s − 1 g RMS − 1 ) and excellent shock rejection. With a scale factor of 800 μV (°s, the SD-BAW gyro system attains a large full-scale range (±1250°s) with a non-linearity of less than 0.07%. A measured angle-random walk (ARW) of 0.39°/√h and a bias instability of 10.5°h − 1 are dominated by the thermal and flicker noise of the integrated circuit (IC), respectively. Additional measurements using external electronics show bias-instability values as low as 3.5°h INTRODUCTIONMicromachined gyroscopes have enabled a myriad of applications that range from basic motion detection for gaming to safety control systems in automobiles 1 . More recently, an increased interest in the use of microelectromechanical system inertial sensors for dead reckoning and pedestrian navigation in handheld electronics has placed stringent requirements on the die size, power consumption, and overall performance of this type of device. To date, most commercially available rate sensors have been designed as low-frequency flexural tuning-fork gyroscopes (TFGs), which are typically sensitive to random vibrations and prone to linear accelerations, such as those experienced under shock. These limitations complicate the use of TFG technology in large-volume, high-end applications, particularly in personal navigation, for which dependencies on fluctuations in the environment translate into long-term drift in the output of the system. Additionally, in recent months, concerns about the high sensitivity of consumer-grade gyroscopes in response to lowfrequency pressure signals that can be used to recover audio have increased as a potential threat for eavesdropping 2 , justifying the need for more environmentally robust rotation sensors.Acceleration suppression mechanisms can be implemented in TFGs to alleviate part of this problem using redundant proof masses that reject shock and vibration as common-mode signals 3 .

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Section: Shock and Vibration Rejectionmentioning

confidence: 99%

Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices

Serrano¹,

Zaman²,

Rahafrooz³

et al. 2016

Microsyst Nanoeng

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“…A completely symmetric, dynamically balanced quadruple mass gyroscope with a 2.2 kHz operational frequency illustrated virtually identical drive and sense mode Q-factors of 0.9 million. The most important thing in the quadruple mass design is to be expected to enable rate-integrating mode of operation due to its unique combination of low energy dissipation and isotropy of both the resonant frequency and damping [15]. A novel micromachined dual-axis TFG could effectively minimize the undesired lateral motion and ensure the anti-phase resonant mode of the two vibration frames [16].…”

Section: Improvement Of Tfg Drive-mode Oscillation Matched Using a DImentioning

confidence: 99%

Improvement of Tuning Fork Gyroscope Drive-mode Oscillation Matched using a Differential Driving Suspension Frame

Van¹,

Tran²,

Ngoc

et al. 2016

IJECE

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This paper presents a novel design of a vibration tuning fork gyroscope (TFG) based on a differential driving suspension coupling spring between two gyroscopes. The proposed TFG is equivalent to a transistor differential amplifier circuit. The mechanical vibrations of driving frames are, therefore, well matched. The matching level depends on stiffness of spring. When three various TFG structures respond to differential stiffness of spring, their the driving frame mechanical vibration is well matched in case the input excitation driving differential phase is less than 3.5, 2.5, and 4, respectively. The fabricated tuning fork gyroscope linearly operates in the range from -200 to +200 degree/s with the resolution of about 0.45 mV/degree/s.

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“…Micro accelerometers and micro gyroscopes are two of the most practical MEMS devices that measure the translational and rotational speed rates of systems, respectively [7,8]. A Coriolis gyroscope, as a micro gyroscope, works based on the generated Coriolis force, and it is classi ed into three major subsets: tuning fork gyroscope [9], beam gyroscope [10], and vibrating ring gyroscope [11]. Vibrating ring gyroscope is a rotating ring connected to a number of sti eners (usually 8 or 16) and actuated by electrostatic force [7].…”

Section: Introductionmentioning

confidence: 99%

Vibrational characteristics of size dependent vibrating ring gyroscope

Karimzadeh

Ahmadian

2018

Scientia Iranica

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Abstract. In this paper, vibrational analysis of a size-dependent micro-ring gyroscope under electrostatic DC voltage is performed. Governing equations of size-dependent micro rings and corresponding nite-element formulation of circular micro ring along with eight half circular sti eners embedded inside the ring are derived based on the modi ed couple stress theory, Hamilton's principle, and in-extensionality approximation. Frequency analysis indicates that the obtained mode shape of the ring gyroscope is slightly di erent from the one previously reported in the literature. Size-dependent behavior of the gyroscope is studied, and related ndings con rm the gap between classic and non-classic natural frequencies and pull-in voltage when the ring thickness is in order of material length scale parameter. Two di erent orientations for the actuation electrodes of the micro-ring gyroscope are implemented, and the e ect of these orientations on the static de ection, pull-in instability, and device frequencies in the sense (45 direction) and drive (0 direction) directions is investigated. Results reveal that the pull-in phenomena take place under lower voltages for 0 and 45 orientation of electrodes in comparison with 0 orientation; frequency split occurs in higher voltages for 0 and 45 orientation. A comparison between nite-element numerical natural frequencies of single ring and previously obtained analytical ones shows excellent agreement.

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Low-Dissipation Silicon Tuning Fork Gyroscopes for Rate and Whole Angle Measurements

Cited by 75 publications

References 9 publications

Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices

Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices

Improvement of Tuning Fork Gyroscope Drive-mode Oscillation Matched using a Differential Driving Suspension Frame

Vibrational characteristics of size dependent vibrating ring gyroscope

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