2001
DOI: 10.1016/s0079-6700(00)00043-5
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Low dielectric constant polymers for microelectronics

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Cited by 1,012 publications
(384 citation statements)
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References 157 publications
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“…In the past decades, polymer dielectrics with low dielectric constant (low-k) and low dissipation factor features have been paid increasing attention in ultralarge scale integrated circuit (ULSI) fabrication due to their abilities to lower the line-to-line noise in interconnects and alleviate power dissipation issues by reducing the capacitance between the interconnect conductor lines so as to achieve faster signal transmission speed [1][2][3]. Among various polymer dielectrics, polyimides (PIs) have been investigated more extensively as high performance interlayer dielectrics (ILDs) than most other polymers due to their desirable high-temperature stability, excellent mechanical and dielectric properties for ULSI fabrications [4][5][6].…”
Section: Introductionmentioning
confidence: 99%
“…In the past decades, polymer dielectrics with low dielectric constant (low-k) and low dissipation factor features have been paid increasing attention in ultralarge scale integrated circuit (ULSI) fabrication due to their abilities to lower the line-to-line noise in interconnects and alleviate power dissipation issues by reducing the capacitance between the interconnect conductor lines so as to achieve faster signal transmission speed [1][2][3]. Among various polymer dielectrics, polyimides (PIs) have been investigated more extensively as high performance interlayer dielectrics (ILDs) than most other polymers due to their desirable high-temperature stability, excellent mechanical and dielectric properties for ULSI fabrications [4][5][6].…”
Section: Introductionmentioning
confidence: 99%
“…In the microelectronics industry low permittivity and dissipation factor, good mechanical and thermal properties are required for intermetal dielectrics, especially in printed circuit board (PCB) industry [5]. Polycyanurates are interesting polymers for low constant and dissipation dielectrics [6][7][8].…”
Section: Introductionmentioning
confidence: 99%
“…The sample FG 0.1 showed the higher #$ r values, while FG 0.025 Y 50 the lower. The samples without YIG had shown the higher #$ r values, which are higher values than polymeric compounds in literature [28][29][30][31]. According to Fechine et al [32], YIG has #$ r near to 7.6 at 10, 100 and 1000 MHz, with a tan $ of 0.0602, 0.0132 and 0.0032, respectively.…”
Section: Resultsmentioning
confidence: 80%