2013
DOI: 10.1117/12.2019653
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Low-cost uncooled VOxinfrared camera development

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Cited by 11 publications
(7 citation statements)
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“…Many applications already exist for these imagers, but are limited by a number of factors to include: resolution, speed and vacuum requirements. Resolution and speed have been addressed most recently by DRS through a DARPA program, resulting in a 5µm pixel size microbolometer 1 . Recent advances in signal processing have pursued both super-resolution 2 and de-blurring techniques 3 to overcome some additional shortcomings of these imagers.…”
Section: Un-cooled Lwir Sensorsmentioning
confidence: 99%
“…Many applications already exist for these imagers, but are limited by a number of factors to include: resolution, speed and vacuum requirements. Resolution and speed have been addressed most recently by DRS through a DARPA program, resulting in a 5µm pixel size microbolometer 1 . Recent advances in signal processing have pursued both super-resolution 2 and de-blurring techniques 3 to overcome some additional shortcomings of these imagers.…”
Section: Un-cooled Lwir Sensorsmentioning
confidence: 99%
“…Although such requirement could be achieved via one-by-one pumping through a fine-bore tube, the cost becomes a bottleneck in lowering the cost of uncooled IRFPAs. Figure 9 shows the concept of the wafer-level packaging (WLP) technology for IRFPA, which is a popular option for cost reduction [ 59 , 101 , 102 ]. In this technology an IR transparent cap wafer is bonded to the IRFPA wafer under vacuum and then the hermetical sealing is achieved using solders.…”
Section: Vacuum Packaging Technologymentioning
confidence: 99%
“…The most popular vacuum packaging technology for uncooled IRFPAs is one‐by‐one pumping through a fine‐bore tube, and this packaging process has been a bottleneck in lowering the cost of uncooled IRFPAs. Efforts have been made to improve the productivity and reduce cost in the vacuum packaging process, and various vacuum packaging technologies have been reported up to now, including wafer‐level packaging , collective packaging , chip‐scale packaging , batch packaging , and pixel‐level packaging technologies.…”
Section: Development Trendsmentioning
confidence: 99%