Low cost multitarget holder for pulsed laser deposition system

Abstract

A low cost multi-target holder (MTH) designed for pulsed laser deposition (PLD) systems fit for vacuum chamber ports of all size was designed and fabricated using only one rotary-linear motion feedthrough. This system can be used with vacuum chamber ports of small size because of the elimination of a second feedthrough. It provides current PLD chambers without enough large ports the ability to grow multi-layer films, and can decrease the required PLD chamber size. Its design of separate low cost MTH head and stud modules can be utilized to further prevent cross contamination from different multi-layer film fabrications. The MTH described was successfully utilized to grow SrRuO3–SrTiO3–SrRuO3 tri-layer films on LaAlO3 substrate.